Probing suprathermal electrons by trace rare gases optical emission spectroscopy in low pressure dipolar microwave plasmas excited at the electron cyclotron resonance

In microwave plasmas with the presence of a magnetic field, fast electrons could result from collisionless energy absorption under electron cyclotron resonance (ECR) conditions. In this case, electrons are trapped between the two poles of the magnetic field and rotate at the cyclotron frequency ω c e. When crossing a zone where the cyclotron frequency equals the microwave frequency ( ω c e = ω), electrons see a steady electric field in their reference frame and are constantly accelerated by the right handed polarized (RHP) wave. When the plasma density reaches the so-called critical density nc at which ω p e 2 = ω 2 ± ω ω c e, where ω p e is the plasma electron frequency, the left handed polarized (LHP) electromagnetic wave can excite electrostatic waves that can produce collisionless electron heating and fast electron generation by Landau damping. In this study, a combination of the Langmuir probe and trace rare gas optical emission spectroscopy (TRG-OES) is used to analyze the electron energy probability function (EEPF) in microwave (2.45 GHz) low-pressure argon plasmas excited at ECR in a dipolar magnetic field. While both TRG-OES and Langmuir probe measurements agree on the effective electron temperature ( T e A l l) from 1.6 to 50 mTorr, TRG-OES, which is more sensitive to high energy electrons, shows that the EEPF is the sum of two Maxwellian populations: one described by T e A l l and a high energy tail characterized by a temperature T e Tail. Spatially resolved-TRG-OES measurements show that the high-energy tail ( T e Tail) in the EEPF is spatially localized near the magnet, while the effective electron temperature ( T e A l l) stays constant. The ratio between the high energy tail and the effective temperatures is found to increase with the absorbed microwave power and decrease with increasing pressure. The former phenomenon is ascribed to a rise in ECR heating due to a stronger RHP wave electric field and to an enhanced absorption of the LHP waves. On the other hand, the decrease in the ratio is attributed to a smaller magnetic confinement of the electrons (increase in the collision frequency), which lessens ECR heating and to a decrease in the LHP field intensity at the resonant position, which impedes the conversion into electrostatic waves.