On-chip beam positioning sensor via frequency locked cascaded ring resonators

We demonstrate an approach for on-chip beam positioning with a position accuracy of up to 100 nm. This approach is based on tracking the resonance of two adjacent microring resonators that are implemented on a silicon on insulator chip. We demonstrate the functionality of our approach by illuminatin...

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Bibliographische Detailangaben

Veröffentlicht in:	Applied physics letters 2018-05, Vol.112 (20)
Hauptverfasser:	Naiman, Alex, Stern, Liron, Levy, Uriel
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied physics Near field optical microscopes Resonance Resonators
Online-Zugang:	Volltext
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