On-chip beam positioning sensor via frequency locked cascaded ring resonators

On-chip beam positioning sensor via frequency locked cascaded ring resonators

We demonstrate an approach for on-chip beam positioning with a position accuracy of up to 100 nm. This approach is based on tracking the resonance of two adjacent microring resonators that are implemented on a silicon on insulator chip. We demonstrate the functionality of our approach by illuminatin...

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Veröffentlicht in:Applied physics letters 2018-05, Vol.112 (20)
Hauptverfasser: Naiman, Alex, Stern, Liron, Levy, Uriel
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Applied physics
Near field optical microscopes
Resonance
Resonators
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Stern, Liron
Levy, Uriel
description We demonstrate an approach for on-chip beam positioning with a position accuracy of up to 100 nm. This approach is based on tracking the resonance of two adjacent microring resonators that are implemented on a silicon on insulator chip. We demonstrate the functionality of our approach by illuminating the chip through a Near Field Scanning Optical Microscope tip and monitoring the shift of the microring resonances due to the thermo-optic effect. We also discuss the contribution of different effects such as free carrier absorption and dispersion to the resonance shift.
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subjects Applied physics
Near field optical microscopes
Resonance
Resonators
title On-chip beam positioning sensor via frequency locked cascaded ring resonators
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