Plasmonic nanoparticle lithography: Fast resist-free laser technique for large-scale sub-50 nm hole array fabrication

Cheap large-scale fabrication of ordered nanostructures is important for multiple applications in photonics and biomedicine including optical filters, solar cells, plasmonic biosensors, and DNA sequencing. Existing methods are either expensive or have strict limitations on the feature size and fabri...

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Veröffentlicht in:	Applied physics letters 2018-05, Vol.112 (22)
Hauptverfasser:	Pan, Zhenying, Yu, Ye Feng, Valuckas, Vytautas, Yap, Sherry L. K., Vienne, Guillaume G., Kuznetsov, Arseniy I.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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