Features of nanostructures sputtering
The research of ion sputtering of nanoparticles is interesting both from the fundamental point of view – for researching the interior structure of nanoobjects, and the economical one – nanostructures often play the role of functional supplements in composite materials under the radiation pressure. T...
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creator | Kapustin, S. N. Matveev, V. I. Eseev, M. K. |
description | The research of ion sputtering of nanoparticles is interesting both from the fundamental point of view – for researching the interior structure of nanoobjects, and the economical one – nanostructures often play the role of functional supplements in composite materials under the radiation pressure. This process should be taken into account while creating objects decorated by nanoclusters during ion implantation. Polyatomic clusters obtained as a result of ion bombing could be used as nanodisperse catalysts or quantum points. |
doi_str_mv | 10.1063/1.5002979 |
format | Conference Proceeding |
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title | Features of nanostructures sputtering |
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