Simulation of the redistribution of ions in ion-magnetron setup

In this paper, some features of ion redistribution in the chamber of ion-magnetron setup were studied numerically. The hydrodynamic model of two-component fully ionized plasma was taken as the basis for model construction. The assumed simplifications allowed dividing the problem into “electrical” an...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Saifullin, Elmir, Knyazeva, Anna
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Computer simulation Electric fields Mathematical models
Online-Zugang:	Volltext
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