A smart microelectromechanical sensor and switch triggered by gas

There is an increasing interest to realize smarter sensors and actuators that can deliver a multitude of sophisticated functionalities while being compact in size and of low cost. We report here combining both sensing and actuation on the same device based on a single microstructure. Specifically, w...

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Veröffentlicht in:	Applied physics letters 2016-07, Vol.109 (1)
Hauptverfasser:	Bouchaala, Adam, Jaber, Nizar, Shekhah, Osama, Chernikova, Valeriya, Eddaoudi, Mohamed, Younis, Mohammad I.
Format:	Artikel
Sprache:	eng
Schlagworte:	Actuation Applied physics Dynamic stability Metal-organic frameworks Microbeams Microstructure
Online-Zugang:	Volltext
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