Electrical performance of Ti-ZnO-Au thin film composite structure for device application

Thin film layers of Au/Ti approximately 2200 Å thick and ZnO approximately 2.24 µm thick were sputtered sequentially onto silicon dioxide coated Si-wafer. Conventional wisdom confirms the adhesion of gold over zinc oxide (ZnO) by an intermediate layer of titanium for better adhesion. But, in Au/Ti/Z...

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Bibliographische Detailangaben

Hauptverfasser:	Joshi, Priyanka, Singh, Jitendra, Das, Surajit, Desai, J. V., Akhtar, Jamil
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Adhesion Composite structures Gold Low resistance Photovoltaic cells Silicon dioxide Thin films Titanium Zinc oxide Zinc oxides
Online-Zugang:	Volltext
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