Adsorption calorimetry during metal vapor deposition on single crystal surfaces: Increased flux, reduced optical radiation, and real-time flux and reflectivity measurements

Thin films of metals and other materials are often grown by physical vapor deposition. To understand such processes, it is desirable to measure the adsorption energy of the deposited species as the film grows, especially when grown on single crystal substrates where the structure of the adsorbed spe...

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Veröffentlicht in:Review of scientific instruments 2013-12, Vol.84 (12), p.123901-123901
Hauptverfasser: Sellers, Jason R. V., James, Trevor E., Hemmingson, Stephanie L., Farmer, Jason A., Campbell, Charles T.
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Sprache:eng
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