Thermal stability of SrFeO 3 / Al 2 O 3 thin films: Transmission electron microscopy study and conductometric sensing response
The SrFeO 3 / Al 2 O 3 thin film system has been studied using transmission electron microscopy (TEM). The thin films of SrFeO 3 were grown by pulsed laser deposition onto single crystal and sintered polycrystalline Al 2 O 3 substrates at room temperature (RT) and 700 ° C and subjected to annealing...
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Veröffentlicht in: | Journal of applied physics 2008-07, Vol.104 (2), p.023530-023530-7 |
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Zusammenfassung: | The
SrFeO
3
/
Al
2
O
3
thin film system has been studied using transmission electron microscopy (TEM). The thin films of
SrFeO
3
were grown by pulsed laser deposition onto single crystal and sintered polycrystalline
Al
2
O
3
substrates at room temperature (RT) and
700
°
C
and subjected to annealing for various periods of time at
700
-
1000
°
C
. TEM characterization showed that the morphology of the film varied with changes of deposition temperature. Films deposited at RT featured a columnar structure and those deposited at
700
°
C
showed layers with crystalline grains. The interfacial structures of the films remained unchanged below
700
°
C
. Interfacial reactions were observed following annealing at
850
°
C
for 5 h. The phase transformation at the interface was characterized for the film annealed at
1000
°
C
for 5 h, for which the principal phases were identified as
SrAl
2
−
x
Fe
x
O
4
and
SrFe
12
−
y
Al
y
O
19
. Evaluation for thin film conductometric sensing applications indicated that the untreated films deposited at
700
°
C
onto both single crystal and sintered
Al
2
O
3
substrates exhibited a
p
-type gas sensor response to oxygen at
500
°
C
. |
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ISSN: | 0021-8979 1089-7550 |
DOI: | 10.1063/1.2957073 |