Data coding tools for color-coded vector nanolithography

We propose and demonstrate the ability and efficiency of using a universal file format for a nanolithography pattern. A problem faced by the physicists working in the field of nanolithography is a lack of a flexible pattern design software (possibly open–source) that could be applied in combination...

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Veröffentlicht in:	Review of scientific instruments 2004-11, Vol.75 (11), p.4646-4650
Hauptverfasser:	Lekki, Janusz, Kumar, Saveen, Parihar, Sunil S., Grange, Sebastien, Baur, Charles, Foschia, Raphael, Kulik, Andrzej
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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