First operation of ECR ion source at Kochi University of Technology

To study nano-scale manufacturing using highly charged ion beams, a facility to produce and irradiate heavy ion beams has been installed at Kochi University of Technology (KUT). The facility includes an ECR ion source (ECRIS), a beam transport and analysis system, and an irradiation system. The firs...

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Veröffentlicht in:	Review of Scientific Instruments 2004-05, Vol.75 (5), p.1497-1498
Hauptverfasser:	Momota, Sadao, Nojiri, Yoichi, Saihara, Miwako, Sakamoto, Asako, Hamagawa, Hisayoshi, Hamaguchi, Kensuke
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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