High resolution imaging and lithography with hard x rays using parabolic compound refractive lenses

Parabolic compound refractive lenses are high quality optical components for hard x rays. They are particularly suited for full field imaging, with applications in microscopy and x-ray lithography. Taking advantage of the large penetration depth of hard x rays, the interior of opaque samples can be...

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Veröffentlicht in:	Review of Scientific Instruments 2002-03, Vol.73 (3), p.1640-1642
Hauptverfasser:	Schroer, C. G., Benner, B., Günzler, T. F., Kuhlmann, M., Zimprich, C., Lengeler, B., Rau, C., Weitkamp, T., Snigirev, A., Snigireva, I., Appenzeller, J.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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