High resolution imaging and lithography with hard x rays using parabolic compound refractive lenses
Parabolic compound refractive lenses are high quality optical components for hard x rays. They are particularly suited for full field imaging, with applications in microscopy and x-ray lithography. Taking advantage of the large penetration depth of hard x rays, the interior of opaque samples can be...
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| Veröffentlicht in: | Review of Scientific Instruments 2002-03, Vol.73 (3), p.1640-1642 |
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| container_title | Review of Scientific Instruments |
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| creator | Schroer, C. G. Benner, B. Günzler, T. F. Kuhlmann, M. Zimprich, C. Lengeler, B. Rau, C. Weitkamp, T. Snigirev, A. Snigireva, I. Appenzeller, J. |
| description | Parabolic compound refractive lenses are high quality optical components for hard x rays. They are particularly suited for full field imaging, with applications in microscopy and x-ray lithography. Taking advantage of the large penetration depth of hard x rays, the interior of opaque samples can be imaged with submicrometer resolution. To obtain the three-dimensional structure of a sample, microscopy is combined with tomographic techniques. In a first hard x-ray lithography experiment, parabolic compound refractive lenses have been used to project the reduced image of a lithography mask onto a resist. Future developments are discussed. |
| doi_str_mv | 10.1063/1.1445827 |
| format | Article |
| fullrecord | <record><control><sourceid>scitation_cross</sourceid><recordid>TN_cdi_scitation_primary_10_1063_1_1445827</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>rsi</sourcerecordid><originalsourceid>FETCH-LOGICAL-c297t-8379b9d680c2a628cdaa841f1dd42d0b9f4fd6d1a2b44a8c7a952b398f7f37bd3</originalsourceid><addsrcrecordid>eNqdkM1OwzAQhC0EEqVw4A18BSnFf43tI6qgRarEBc7Rxo4TozSO7KTQtydVK3FnLjuHb1c7g9A9JQtKcv5EF1SIpWLyAs0oUTqTOeOXaEYIF1kuhbpGNyl9kUlLSmfIbHzd4Fil0I6DDx32O6h9V2PoLG790IQ6Qt8c8PfkcQPR4h8c4ZDwmI5YDxHK0HqDTdj1YZy2YuUimMHvK9xWXarSLbpy0Kbq7jzn6PP15WO1ybbv67fV8zYzTMshU1zqUttcEcMgZ8pYACWoo9YKZkmpnXA2txRYKQQoI0EvWcm1ctJxWVo-Rw-nuyaGlKY3ij5OceKhoKQ4tlPQ4tzOxD6e2GT8AMfk_4P3If6BRW8d_wUqS3Wl</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>High resolution imaging and lithography with hard x rays using parabolic compound refractive lenses</title><source>AIP Journals Complete</source><source>AIP Digital Archive</source><creator>Schroer, C. G. ; Benner, B. ; Günzler, T. F. ; Kuhlmann, M. ; Zimprich, C. ; Lengeler, B. ; Rau, C. ; Weitkamp, T. ; Snigirev, A. ; Snigireva, I. ; Appenzeller, J.</creator><creatorcontrib>Schroer, C. G. ; Benner, B. ; Günzler, T. F. ; Kuhlmann, M. ; Zimprich, C. ; Lengeler, B. ; Rau, C. ; Weitkamp, T. ; Snigirev, A. ; Snigireva, I. ; Appenzeller, J.</creatorcontrib><description>Parabolic compound refractive lenses are high quality optical components for hard x rays. They are particularly suited for full field imaging, with applications in microscopy and x-ray lithography. Taking advantage of the large penetration depth of hard x rays, the interior of opaque samples can be imaged with submicrometer resolution. To obtain the three-dimensional structure of a sample, microscopy is combined with tomographic techniques. In a first hard x-ray lithography experiment, parabolic compound refractive lenses have been used to project the reduced image of a lithography mask onto a resist. Future developments are discussed.</description><identifier>ISSN: 0034-6748</identifier><identifier>EISSN: 1089-7623</identifier><identifier>DOI: 10.1063/1.1445827</identifier><identifier>CODEN: RSINAK</identifier><language>eng</language><ispartof>Review of Scientific Instruments, 2002-03, Vol.73 (3), p.1640-1642</ispartof><rights>American Institute of Physics</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c297t-8379b9d680c2a628cdaa841f1dd42d0b9f4fd6d1a2b44a8c7a952b398f7f37bd3</citedby><cites>FETCH-LOGICAL-c297t-8379b9d680c2a628cdaa841f1dd42d0b9f4fd6d1a2b44a8c7a952b398f7f37bd3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://pubs.aip.org/rsi/article-lookup/doi/10.1063/1.1445827$$EHTML$$P50$$Gscitation$$H</linktohtml><link.rule.ids>309,310,314,780,784,789,790,794,1559,4512,23930,23931,25140,27924,27925,76384,76390</link.rule.ids></links><search><creatorcontrib>Schroer, C. G.</creatorcontrib><creatorcontrib>Benner, B.</creatorcontrib><creatorcontrib>Günzler, T. F.</creatorcontrib><creatorcontrib>Kuhlmann, M.</creatorcontrib><creatorcontrib>Zimprich, C.</creatorcontrib><creatorcontrib>Lengeler, B.</creatorcontrib><creatorcontrib>Rau, C.</creatorcontrib><creatorcontrib>Weitkamp, T.</creatorcontrib><creatorcontrib>Snigirev, A.</creatorcontrib><creatorcontrib>Snigireva, I.</creatorcontrib><creatorcontrib>Appenzeller, J.</creatorcontrib><title>High resolution imaging and lithography with hard x rays using parabolic compound refractive lenses</title><title>Review of Scientific Instruments</title><description>Parabolic compound refractive lenses are high quality optical components for hard x rays. They are particularly suited for full field imaging, with applications in microscopy and x-ray lithography. Taking advantage of the large penetration depth of hard x rays, the interior of opaque samples can be imaged with submicrometer resolution. To obtain the three-dimensional structure of a sample, microscopy is combined with tomographic techniques. In a first hard x-ray lithography experiment, parabolic compound refractive lenses have been used to project the reduced image of a lithography mask onto a resist. Future developments are discussed.</description><issn>0034-6748</issn><issn>1089-7623</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2002</creationdate><recordtype>article</recordtype><recordid>eNqdkM1OwzAQhC0EEqVw4A18BSnFf43tI6qgRarEBc7Rxo4TozSO7KTQtydVK3FnLjuHb1c7g9A9JQtKcv5EF1SIpWLyAs0oUTqTOeOXaEYIF1kuhbpGNyl9kUlLSmfIbHzd4Fil0I6DDx32O6h9V2PoLG790IQ6Qt8c8PfkcQPR4h8c4ZDwmI5YDxHK0HqDTdj1YZy2YuUimMHvK9xWXarSLbpy0Kbq7jzn6PP15WO1ybbv67fV8zYzTMshU1zqUttcEcMgZ8pYACWoo9YKZkmpnXA2txRYKQQoI0EvWcm1ctJxWVo-Rw-nuyaGlKY3ij5OceKhoKQ4tlPQ4tzOxD6e2GT8AMfk_4P3If6BRW8d_wUqS3Wl</recordid><startdate>200203</startdate><enddate>200203</enddate><creator>Schroer, C. G.</creator><creator>Benner, B.</creator><creator>Günzler, T. F.</creator><creator>Kuhlmann, M.</creator><creator>Zimprich, C.</creator><creator>Lengeler, B.</creator><creator>Rau, C.</creator><creator>Weitkamp, T.</creator><creator>Snigirev, A.</creator><creator>Snigireva, I.</creator><creator>Appenzeller, J.</creator><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>200203</creationdate><title>High resolution imaging and lithography with hard x rays using parabolic compound refractive lenses</title><author>Schroer, C. G. ; Benner, B. ; Günzler, T. F. ; Kuhlmann, M. ; Zimprich, C. ; Lengeler, B. ; Rau, C. ; Weitkamp, T. ; Snigirev, A. ; Snigireva, I. ; Appenzeller, J.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c297t-8379b9d680c2a628cdaa841f1dd42d0b9f4fd6d1a2b44a8c7a952b398f7f37bd3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2002</creationdate><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Schroer, C. G.</creatorcontrib><creatorcontrib>Benner, B.</creatorcontrib><creatorcontrib>Günzler, T. F.</creatorcontrib><creatorcontrib>Kuhlmann, M.</creatorcontrib><creatorcontrib>Zimprich, C.</creatorcontrib><creatorcontrib>Lengeler, B.</creatorcontrib><creatorcontrib>Rau, C.</creatorcontrib><creatorcontrib>Weitkamp, T.</creatorcontrib><creatorcontrib>Snigirev, A.</creatorcontrib><creatorcontrib>Snigireva, I.</creatorcontrib><creatorcontrib>Appenzeller, J.</creatorcontrib><collection>CrossRef</collection><jtitle>Review of Scientific Instruments</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Schroer, C. G.</au><au>Benner, B.</au><au>Günzler, T. F.</au><au>Kuhlmann, M.</au><au>Zimprich, C.</au><au>Lengeler, B.</au><au>Rau, C.</au><au>Weitkamp, T.</au><au>Snigirev, A.</au><au>Snigireva, I.</au><au>Appenzeller, J.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>High resolution imaging and lithography with hard x rays using parabolic compound refractive lenses</atitle><jtitle>Review of Scientific Instruments</jtitle><date>2002-03</date><risdate>2002</risdate><volume>73</volume><issue>3</issue><spage>1640</spage><epage>1642</epage><pages>1640-1642</pages><issn>0034-6748</issn><eissn>1089-7623</eissn><coden>RSINAK</coden><abstract>Parabolic compound refractive lenses are high quality optical components for hard x rays. They are particularly suited for full field imaging, with applications in microscopy and x-ray lithography. Taking advantage of the large penetration depth of hard x rays, the interior of opaque samples can be imaged with submicrometer resolution. To obtain the three-dimensional structure of a sample, microscopy is combined with tomographic techniques. In a first hard x-ray lithography experiment, parabolic compound refractive lenses have been used to project the reduced image of a lithography mask onto a resist. Future developments are discussed.</abstract><doi>10.1063/1.1445827</doi><tpages>3</tpages></addata></record> |
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| ispartof | Review of Scientific Instruments, 2002-03, Vol.73 (3), p.1640-1642 |
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| language | eng |
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| source | AIP Journals Complete; AIP Digital Archive |
| title | High resolution imaging and lithography with hard x rays using parabolic compound refractive lenses |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-01T14%3A36%3A53IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-scitation_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=High%20resolution%20imaging%20and%20lithography%20with%20hard%20x%20rays%20using%20parabolic%20compound%20refractive%20lenses&rft.jtitle=Review%20of%20Scientific%20Instruments&rft.au=Schroer,%20C.%20G.&rft.date=2002-03&rft.volume=73&rft.issue=3&rft.spage=1640&rft.epage=1642&rft.pages=1640-1642&rft.issn=0034-6748&rft.eissn=1089-7623&rft.coden=RSINAK&rft_id=info:doi/10.1063/1.1445827&rft_dat=%3Cscitation_cross%3Ersi%3C/scitation_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |