Powerful source of accelerated atoms for surface modification

Source of accelerated atoms based on the trap with crossed fields (radial electrical and axial magnetic) is considered. Source produces simultaneously intensive (up to 20–50  mA/cm 2 ) fluxes of accelerated (1–10  keV) atoms and slow (up to 100 eV) atoms. Accelerated atoms are formed in source volum...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Review of Scientific Instruments 1998-02, Vol.69 (2), p.856-858
Hauptverfasser:	Churkin, I. N., Volosov, V. I., Steshov, A. G.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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