Atomic layer deposition of CaB2O4 films using bis(tris(pyrazolyl)borate)calcium as a highly thermally stable boron and calcium sourceElectronic supplementary information (ESI) available: Details of film characterization. See DOI: 10.1039/c0jm02280b

The atomic layer deposition of CaB 2 O 4 was carried out using bis(tris(pyrazolyl)borate)calcium (CaTp 2 ) and water as precursors. CaTp 2 melts at 280 °C, undergoes solid state thermal decomposition at 385 °C, and sublimed on a preparative scale at 180 °C/0.05 Torr in about 3 hours with 99.7% recov...

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Hauptverfasser:	Saly, Mark J, Munnik, Frans, Winter, Charles H
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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