Study of Gallium-Doped Zinc Oxide Thin Films Processed by Atomic Layer Deposition and RF Magnetron Sputtering for Transparent Antenna Applications

Gallium-doped zinc oxide (GZO) films were fabricated using RF magnetron sputtering and atomic layer deposition (ALD). The latter ones demonstrate higher electrical conductivities (up to 2700 S cm–1) and enhanced charge mobilities (18 cm2 V–1 s–1). The morphological analysis reveals differences mostl...

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Veröffentlicht in:	ACS omega 2023-02, Vol.8 (6), p.5475-5485
Hauptverfasser:	Lunca-Popa, Petru, Chemin, Jean-Baptiste, Adjeroud, Noureddine, Kovacova, Veronika, Glinsek, Sebastjan, Valle, Nathalie, El Hachemi, Mohamed, Girod, Stéphanie, Bouton, Olivier, Maris, Jérôme Polesel
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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