Dewetting Process of Silver Thin Films and Its Application on Percolative Pressure Sensors with High Sensitivity
This work reports on an innovative dewetting process of silver thin films to realize percolative nanoparticle arrays (NPAs) and demonstrates its application on highly sensitive pressure sensors. The dewetting process, which is a simple and promising technique, synthesizes NPAs by breaking the as-dep...
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| Veröffentlicht in: | Polymers 2022-12, Vol.15 (1), p.180 |
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| creator | Cho, Chia-Yu Chang, Jui-Chen Cai, Min-Xian Lin, Pei-Ting Yang, Yao-Joe |
| description | This work reports on an innovative dewetting process of silver thin films to realize percolative nanoparticle arrays (NPAs) and demonstrates its application on highly sensitive pressure sensors. The dewetting process, which is a simple and promising technique, synthesizes NPAs by breaking the as-deposited metal film into randomly distributed islands. The NPA properties, such as the mean particle size and the spacing between adjacent particles, can be easily tailored by controlling the dewetting temperature, as well as the as-deposited metal-film thickness. The fabricated NPAs were employed to develop gauge pressure sensors with high sensitivity. The proposed sensor consists of a sealed reference-pressure cavity, a polyimide (PI) membrane patterned with an interdigital electrode pair (IEP), and a silver NPA deposited on the IEP and the PI membrane. The operational principle of the device is based on the NPA percolation effect with deformation-dependence. The fabricated sensors exhibit rapid responses and excellent linearity at around 1 atm. The maximum sensitivity is about 0.1 kPa
. The advantages of the proposed devices include ultrahigh sensitivity, a reduced thermal disturbance, and a decreased power consumption. A practical application of this pressure sensor with high resolution was demonstrated by using it to measure the relative floor height of a building. |
| doi_str_mv | 10.3390/polym15010180 |
| format | Article |
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. The advantages of the proposed devices include ultrahigh sensitivity, a reduced thermal disturbance, and a decreased power consumption. A practical application of this pressure sensor with high resolution was demonstrated by using it to measure the relative floor height of a building.</description><subject>Annealing</subject><subject>Arrays</subject><subject>Deformation effects</subject><subject>Drying</subject><subject>Electron transport</subject><subject>Etching</subject><subject>Film thickness</subject><subject>Membranes</subject><subject>Micromachining</subject><subject>Mobile devices</subject><subject>Nanoparticles</subject><subject>Percolation</subject><subject>Power consumption</subject><subject>Pressure sensors</subject><subject>Sensitivity</subject><subject>Sensors</subject><subject>Silver</subject><subject>Thin films</subject><issn>2073-4360</issn><issn>2073-4360</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2022</creationdate><recordtype>article</recordtype><sourceid>ABUWG</sourceid><sourceid>AFKRA</sourceid><sourceid>AZQEC</sourceid><sourceid>BENPR</sourceid><sourceid>CCPQU</sourceid><sourceid>DWQXO</sourceid><recordid>eNpdkcFrHSEQxpfS0oQ0x16L0Esvm-rq6nopPNKmCQQSSHoW1x3fM7i61d0X3n9fk5eGJCKMjr_vc4apqs8En1Aq8fcp-t1IWkww6fC76rDBgtaMcvz-xfmgOs75DpfFWs6J-Fgd0BJ5S8lhNf2Ee5hnF9boOkUDOaNo0Y3zW0joduMCOnN-zEiHAV3MGa2myTujZxcDKvsakom-XLdQ9EW9JEA3EHJMGd27eYPO3XrzmHEFcvPuU_XBap_h-CkeVX_Oft2enteXV78vTleXtWEtm2uuYRiIEK21TBKMZU-pGaCTQjc96SzWLcNW9L2w0A5Gm4Ya6HoiuaS055QeVT_2vtPSjzAYCHPSXk3JjTrtVNROvX4JbqPWcatk11Da8GLw7ckgxb8L5FmNLhvwXgeIS1aN4ER2VHakoF_foHdxSaG090iVonjDCnWyp9bag3LBxvJvqVwPMDoTA1hX8ivBOGOY0wfbei8wKeacwD5XT7B6mL96Nf_Cf3nZ8jP9f9r0HzKzrbw</recordid><startdate>20221230</startdate><enddate>20221230</enddate><creator>Cho, Chia-Yu</creator><creator>Chang, Jui-Chen</creator><creator>Cai, Min-Xian</creator><creator>Lin, Pei-Ting</creator><creator>Yang, Yao-Joe</creator><general>MDPI AG</general><general>MDPI</general><scope>NPM</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SR</scope><scope>8FD</scope><scope>8FE</scope><scope>8FG</scope><scope>ABJCF</scope><scope>ABUWG</scope><scope>AFKRA</scope><scope>AZQEC</scope><scope>BENPR</scope><scope>BGLVJ</scope><scope>CCPQU</scope><scope>D1I</scope><scope>DWQXO</scope><scope>HCIFZ</scope><scope>JG9</scope><scope>KB.</scope><scope>PDBOC</scope><scope>PIMPY</scope><scope>PQEST</scope><scope>PQQKQ</scope><scope>PQUKI</scope><scope>PRINS</scope><scope>7X8</scope><scope>5PM</scope></search><sort><creationdate>20221230</creationdate><title>Dewetting Process of Silver Thin Films and Its Application on Percolative Pressure Sensors with High Sensitivity</title><author>Cho, Chia-Yu ; Chang, Jui-Chen ; Cai, Min-Xian ; Lin, Pei-Ting ; Yang, Yao-Joe</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c454t-6aedd1775ff491009b33cde897a2b18f0a540f7bb7fe5dcac23ce8b196933b633</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2022</creationdate><topic>Annealing</topic><topic>Arrays</topic><topic>Deformation effects</topic><topic>Drying</topic><topic>Electron transport</topic><topic>Etching</topic><topic>Film thickness</topic><topic>Membranes</topic><topic>Micromachining</topic><topic>Mobile devices</topic><topic>Nanoparticles</topic><topic>Percolation</topic><topic>Power consumption</topic><topic>Pressure sensors</topic><topic>Sensitivity</topic><topic>Sensors</topic><topic>Silver</topic><topic>Thin films</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Cho, Chia-Yu</creatorcontrib><creatorcontrib>Chang, Jui-Chen</creatorcontrib><creatorcontrib>Cai, Min-Xian</creatorcontrib><creatorcontrib>Lin, Pei-Ting</creatorcontrib><creatorcontrib>Yang, Yao-Joe</creatorcontrib><collection>PubMed</collection><collection>CrossRef</collection><collection>Engineered Materials Abstracts</collection><collection>Technology Research Database</collection><collection>ProQuest SciTech Collection</collection><collection>ProQuest Technology Collection</collection><collection>Materials Science & Engineering Collection</collection><collection>ProQuest Central (Alumni Edition)</collection><collection>ProQuest Central UK/Ireland</collection><collection>ProQuest Central Essentials</collection><collection>ProQuest Central</collection><collection>Technology Collection</collection><collection>ProQuest One Community College</collection><collection>ProQuest Materials Science Collection</collection><collection>ProQuest Central Korea</collection><collection>SciTech Premium Collection</collection><collection>Materials Research Database</collection><collection>Materials Science Database</collection><collection>Materials Science Collection</collection><collection>Publicly Available Content Database</collection><collection>ProQuest One Academic Eastern Edition (DO NOT USE)</collection><collection>ProQuest One Academic</collection><collection>ProQuest One Academic UKI Edition</collection><collection>ProQuest Central China</collection><collection>MEDLINE - Academic</collection><collection>PubMed Central (Full Participant titles)</collection><jtitle>Polymers</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Cho, Chia-Yu</au><au>Chang, Jui-Chen</au><au>Cai, Min-Xian</au><au>Lin, Pei-Ting</au><au>Yang, Yao-Joe</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Dewetting Process of Silver Thin Films and Its Application on Percolative Pressure Sensors with High Sensitivity</atitle><jtitle>Polymers</jtitle><addtitle>Polymers (Basel)</addtitle><date>2022-12-30</date><risdate>2022</risdate><volume>15</volume><issue>1</issue><spage>180</spage><pages>180-</pages><issn>2073-4360</issn><eissn>2073-4360</eissn><abstract>This work reports on an innovative dewetting process of silver thin films to realize percolative nanoparticle arrays (NPAs) and demonstrates its application on highly sensitive pressure sensors. The dewetting process, which is a simple and promising technique, synthesizes NPAs by breaking the as-deposited metal film into randomly distributed islands. The NPA properties, such as the mean particle size and the spacing between adjacent particles, can be easily tailored by controlling the dewetting temperature, as well as the as-deposited metal-film thickness. The fabricated NPAs were employed to develop gauge pressure sensors with high sensitivity. The proposed sensor consists of a sealed reference-pressure cavity, a polyimide (PI) membrane patterned with an interdigital electrode pair (IEP), and a silver NPA deposited on the IEP and the PI membrane. The operational principle of the device is based on the NPA percolation effect with deformation-dependence. The fabricated sensors exhibit rapid responses and excellent linearity at around 1 atm. The maximum sensitivity is about 0.1 kPa
. The advantages of the proposed devices include ultrahigh sensitivity, a reduced thermal disturbance, and a decreased power consumption. A practical application of this pressure sensor with high resolution was demonstrated by using it to measure the relative floor height of a building.</abstract><cop>Switzerland</cop><pub>MDPI AG</pub><pmid>36616531</pmid><doi>10.3390/polym15010180</doi><oa>free_for_read</oa></addata></record> |
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| source | Elektronische Zeitschriftenbibliothek - Frei zugängliche E-Journals; PubMed Central Open Access; MDPI - Multidisciplinary Digital Publishing Institute; PubMed Central |
| subjects | Annealing Arrays Deformation effects Drying Electron transport Etching Film thickness Membranes Micromachining Mobile devices Nanoparticles Percolation Power consumption Pressure sensors Sensitivity Sensors Silver Thin films |
| title | Dewetting Process of Silver Thin Films and Its Application on Percolative Pressure Sensors with High Sensitivity |
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