Ultrasensitive detection of low-ppm H2S gases based on palladium-doped porous silicon sensors
In this study, the sensing properties of palladium-doped porous silicon (Pd/p-Si) substrates for low-ppm level detection of toxic H2S gas are investigated. A Si substrate with dead-end pores ranging from nano- to macroscale was generated by a combined process of metal-assisted chemical etching (MacE...
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Veröffentlicht in: | RSC advances 2018-01, Vol.8 (52), p.29995-30001 |
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Format: | Artikel |
Sprache: | eng |
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