Ultrasensitive detection of low-ppm H2S gases based on palladium-doped porous silicon sensors

In this study, the sensing properties of palladium-doped porous silicon (Pd/p-Si) substrates for low-ppm level detection of toxic H2S gas are investigated. A Si substrate with dead-end pores ranging from nano- to macroscale was generated by a combined process of metal-assisted chemical etching (MacE...

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Veröffentlicht in:RSC advances 2018-01, Vol.8 (52), p.29995-30001
Hauptverfasser: Nu Si A Eom, Hong-Baek, Cho, Lim, Hyo-Ryoung, Hwang, Tea-Yeon, Song, Yoseb, Yong-Ho Choa
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Sprache:eng
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