Electrical Conduction Properties of Hydrogenated Amorphous Carbon Films with Different Structures

Hydrogenated amorphous carbon (a-C:H) films have optical and electrical properties that vary widely depending on deposition conditions; however, the electrical conduction mechanism, which is dependent on the film structure, has not yet been fully revealed. To understand the relationship between the...

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Veröffentlicht in:Materials 2021-05, Vol.14 (9), p.2355
Hauptverfasser: Tomidokoro, Masashi, Tunmee, Sarayut, Rittihong, Ukit, Euaruksakul, Chanan, Supruangnet, Ratchadaporn, Nakajima, Hideki, Hirata, Yuki, Ohtake, Naoto, Akasaka, Hiroki
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container_issue 9
container_start_page 2355
container_title Materials
container_volume 14
creator Tomidokoro, Masashi
Tunmee, Sarayut
Rittihong, Ukit
Euaruksakul, Chanan
Supruangnet, Ratchadaporn
Nakajima, Hideki
Hirata, Yuki
Ohtake, Naoto
Akasaka, Hiroki
description Hydrogenated amorphous carbon (a-C:H) films have optical and electrical properties that vary widely depending on deposition conditions; however, the electrical conduction mechanism, which is dependent on the film structure, has not yet been fully revealed. To understand the relationship between the film structure and electrical conduction mechanism, three types of a-C:H films were prepared and their film structures and electrical properties were evaluated. The sp2/(sp2 + sp3) ratios were measured by a near-edge X-ray absorption fine structure technique. From the conductivity–temperature relationship, variable-range hopping (VRH) conduction was shown to be the dominant conduction mechanism at low temperatures, and the electrical conduction mechanism changed at a transition temperature from VRH conduction to thermally activated band conduction. On the basis of structural analyses, a model of the microstructure of a-C:H that consists of sp2 and sp3-bonded carbon clusters, hydrogen atoms and dangling bonds was built. Furthermore, it is explained how several electrical conduction parameters are affected by the carrier transportation path among the clusters.
doi_str_mv 10.3390/ma14092355
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source PubMed Central Open Access; MDPI - Multidisciplinary Digital Publishing Institute; EZB-FREE-00999 freely available EZB journals; PubMed Central; Free Full-Text Journals in Chemistry
subjects Amorphous structure
Carbon
Chemical bonds
Chemical vapor deposition
Clusters
Conduction bands
Electrical conduction
Electrical properties
Fine structure
Glass substrates
Hopping conduction
Hydrogen
Hydrogen atoms
Hydrogenation
Low temperature
Mechanical properties
Optical properties
Transition temperature
X ray absorption
title Electrical Conduction Properties of Hydrogenated Amorphous Carbon Films with Different Structures
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