Stability under humidity, UV-light and bending of AZO films deposited by ALD on Kapton

Aluminium doped zinc oxide (AZO) films were grown by Atomic Layer Deposition (ALD) on yellow Kapton and transparent Kapton (type CS) substrates for large area flexible transparent thermoelectric applications, which performance relies on the thermoelectric properties of the transparent AZO films. The...

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Veröffentlicht in:Scientific reports 2019-11, Vol.9 (1), p.17919-9, Article 17919
Hauptverfasser: Marques, A. C., Faria, J., Perdigão, P., Faustino, B. M. M., Ritasalo, Riina, Costabello, Katiuscia, da Silva, R. C., Ferreira, I.
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container_end_page 9
container_issue 1
container_start_page 17919
container_title Scientific reports
container_volume 9
creator Marques, A. C.
Faria, J.
Perdigão, P.
Faustino, B. M. M.
Ritasalo, Riina
Costabello, Katiuscia
da Silva, R. C.
Ferreira, I.
description Aluminium doped zinc oxide (AZO) films were grown by Atomic Layer Deposition (ALD) on yellow Kapton and transparent Kapton (type CS) substrates for large area flexible transparent thermoelectric applications, which performance relies on the thermoelectric properties of the transparent AZO films. Therefore, their adhesion to Kapton, environmental and bending stability were accessed. Plasma treatment on Kapton substrates improved films adhesion, reduced cracks formation, and enhanced electrical resistance stability over time, of importance for long term thermoelectric applications in external environment. While exposure to UV light intensity caused the films electrical resistance to vary, and therefore their maximum power density outputs (0.3–0.4 mW/cm 3 ) for a constant temperature difference (∼10 °C), humidity exposure and consecutive bending up to a curvature radius above the critical one (∼18 mm) not. Testing whether the films can benefit from encapsulation revealed that this can provide extra bending stability and prevent contacts deterioration in the long term.
doi_str_mv 10.1038/s41598-019-54451-0
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subjects 132/122
639/301/1005/1009
639/4077/4072/4062
Adhesion
Aluminum
Humanities and Social Sciences
Humidity
Light intensity
Long term
multidisciplinary
Science
Science (multidisciplinary)
Ultraviolet radiation
Zinc oxide
title Stability under humidity, UV-light and bending of AZO films deposited by ALD on Kapton
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