Silicon photonics waveguide array sensor for selective detection of VOCs at room temperature

We report on the fabrication and characterization of a volatile organic compound sensor architecture addressing common drawbacks of photonic integrated sensors such as reusability and specificity. The proposed sensor, built on a silicon-on-insulator platform and based on arrayed waveguide interferen...

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Veröffentlicht in:Scientific reports 2019-11, Vol.9 (1), p.17099-13, Article 17099
Hauptverfasser: Janeiro, Ricardo, Flores, Raquel, Viegas, Jaime
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Sprache:eng
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