High-performance Acetone Soluble Tape Transfer Printing Method for Heterogeneous Integration

A high-performance transfer printing method using a new soluble tape which can be dissolved in acetone is proposed to be used in heterogeneous integration. Si inks array was transferred from SOI wafers onto various substrates without adhesion promoter by this new method which we refer to as the acet...

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Veröffentlicht in:	Scientific reports 2019-10, Vol.9 (1), p.15769-7, Article 15769
Hauptverfasser:	Zhang, Jiaqi, Wu, Yichang, Li, Zhe, Zhang, Yachao, Peng, Yue, Chen, Dazheng, Zhu, Weidong, Xu, Shengrui, Zhang, Chunfu, Hao, Yue
Format:	Artikel
Sprache:	eng
Schlagworte:	639/166/987 639/301/1005/1007 Acetone Adhesion Adhesives Efficiency High temperature Humanities and Social Sciences Integration Methods multidisciplinary Polydimethylsiloxane Printing Science Science (multidisciplinary) Semiconductors Silicon Substrates
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