On-Chip Non-Dispersive Infrared CO2 Sensor Based on an Integrating Cylinder
In this paper, we propose a novel, miniaturized non-dispersive infrared (NDIR) CO2 sensor implemented on a silicon chip. The sensor has a simple structure, consisting of a hollow metallic cylindrical cavity along with access waveguides. A detailed analysis of the proposed sensor is presented. Simula...
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| Veröffentlicht in: | Sensors (Basel, Switzerland) Switzerland), 2019-09, Vol.19 (19), p.4260 |
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| creator | Jia, Xiaoning Roels, Joris Baets, Roel Roelkens, Gunther |
| description | In this paper, we propose a novel, miniaturized non-dispersive infrared (NDIR) CO2 sensor implemented on a silicon chip. The sensor has a simple structure, consisting of a hollow metallic cylindrical cavity along with access waveguides. A detailed analysis of the proposed sensor is presented. Simulation with 3D ray tracing shows that an integrating cylinder with 4 mm diameter gives an equivalent optical path length of 3.5 cm. The sensor is fabricated using Deep Reactive Ion Etching (DRIE) and wafer bonding. The fabricated sensor was evaluated by performing a CO2 concentration measurement, showing a limit of detection of ∼100 ppm. The response time of the sensor is only ∼2.8 s, due to its small footprint. The use of DRIE-based waveguide structures enables mass fabrication, as well as the potential co-integration of flip-chip integrated midIR light-emitting diodes (LEDs) and photodetectors, resulting in a compact, low-power, and low-cost NDIR CO2 sensor. |
| doi_str_mv | 10.3390/s19194260 |
| format | Article |
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| source | MDPI - Multidisciplinary Digital Publishing Institute; DOAJ Directory of Open Access Journals; EZB-FREE-00999 freely available EZB journals; PubMed Central; Free Full-Text Journals in Chemistry |
| subjects | Accuracy Air conditioning Carbon dioxide Cylinders Gases Light Light emitting diodes Process controls Ray tracing Reactive ion etching Response time Sensors Waveguides |
| title | On-Chip Non-Dispersive Infrared CO2 Sensor Based on an Integrating Cylinder |
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