Optical Properties of Thin Films on Transparent Surfaces by Ellipsometry; Internal Reflection for Film Covered Surfaces Near the Critical Angle

The application of ellipsometry to the determination of the optical properties of thin films on transparent substrates by the use of internal reflection and angles of incidence near the critical angle for total reflection is described and illustrated. Four cases are considered: 1. the angle of incid...

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Veröffentlicht in:Journal of research of the National Bureau of Standards. Section A. Physics and chemistry 1964-11, Vol.68A (6), p.601-610
Hauptverfasser: Passaglia, Elio, Stromberg, Robert R
Format: Artikel
Sprache:eng
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