Effects of Heating Mode and Temperature on the Microstructures, Electrical and Optical Properties of Molybdenum Thin Films
In this paper, molybdenum (Mo) thin films are deposited on soda-lime glass (SLG) substrates by direct current magnetron sputtering and heated in three different modes at different temperatures, including substrate heating, annealing treatment, and both substrate heating and annealing treatment. The...
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| Veröffentlicht in: | Materials 2018-09, Vol.11 (9), p.1634 |
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| description | In this paper, molybdenum (Mo) thin films are deposited on soda-lime glass (SLG) substrates by direct current magnetron sputtering and heated in three different modes at different temperatures, including substrate heating, annealing treatment, and both substrate heating and annealing treatment. The effects of heating temperature and heating mode on the structures, morphology, optical and electrical properties of Mo thin films were systematically investigated by X-ray diffraction (XRD), Scanning electron microscopy (SEM), atomic force microscope (AFM) and UV-visible spectrophotometer (UV-vis spectra). It is shown that as the substrate and annealing temperature increase, the crystallinity of Mo thin films is improved, and the grain sizes become bigger. Especially in the mode of both substrate heating and annealing treatment at higher temperature, the obtained Mo thin films show higher crystallinity and conductivity. Moreover, with the increase of substrate and annealing temperature in different heating modes, both the surface compactness of Mo films and the optical reflectance increase correspondingly. Furthermore, the Mo film, prepared at the substrate heating temperature of 400 °C and annealed at 400 °C, showed excellent comprehensive performance, and the resistivity is as low as 1.36 × 10
Ω·cm. Using this optimized Mo thin film as an electrode, copper indium gallium selenium (CIGS) solar cells have a maximum photo-conversion efficiency of 12.8%. |
| doi_str_mv | 10.3390/ma11091634 |
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Ω·cm. Using this optimized Mo thin film as an electrode, copper indium gallium selenium (CIGS) solar cells have a maximum photo-conversion efficiency of 12.8%.</description><identifier>ISSN: 1996-1944</identifier><identifier>EISSN: 1996-1944</identifier><identifier>DOI: 10.3390/ma11091634</identifier><identifier>PMID: 30200622</identifier><language>eng</language><publisher>Switzerland: MDPI AG</publisher><subject>Annealing ; Atomic force microscopes ; Atomic force microscopy ; Copper converters ; Copper indium gallium selenides ; Crystal structure ; Crystallinity ; Direct current ; Electrical properties ; Electrodes ; Glass substrates ; Grain size ; Heating ; High temperature ; Indium ; Magnetron sputtering ; Molybdenum ; Morphology ; Optical properties ; Photovoltaic cells ; Selenium ; Soda-lime glass ; Solar cells ; Thin films ; Zinc oxides</subject><ispartof>Materials, 2018-09, Vol.11 (9), p.1634</ispartof><rights>2018 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). Notwithstanding the ProQuest Terms and Conditions, you may use this content in accordance with the terms of the License.</rights><rights>2018 by the authors. 2018</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c406t-5f90eb751676f78d1996d23bbe09e61f61461c0683cbc4b629fc4ffe4ddb03753</citedby><cites>FETCH-LOGICAL-c406t-5f90eb751676f78d1996d23bbe09e61f61461c0683cbc4b629fc4ffe4ddb03753</cites><orcidid>0000-0001-9934-8258</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://www.ncbi.nlm.nih.gov/pmc/articles/PMC6163281/pdf/$$EPDF$$P50$$Gpubmedcentral$$Hfree_for_read</linktopdf><linktohtml>$$Uhttps://www.ncbi.nlm.nih.gov/pmc/articles/PMC6163281/$$EHTML$$P50$$Gpubmedcentral$$Hfree_for_read</linktohtml><link.rule.ids>230,314,724,777,781,882,27905,27906,53772,53774</link.rule.ids><backlink>$$Uhttps://www.ncbi.nlm.nih.gov/pubmed/30200622$$D View this record in MEDLINE/PubMed$$Hfree_for_read</backlink></links><search><creatorcontrib>Zhao, Haili</creatorcontrib><creatorcontrib>Xie, Jingpei</creatorcontrib><creatorcontrib>Mao, Aixia</creatorcontrib><creatorcontrib>Wang, Aiqin</creatorcontrib><creatorcontrib>Chen, Yanfang</creatorcontrib><creatorcontrib>Liang, Tingting</creatorcontrib><creatorcontrib>Ma, Douqin</creatorcontrib><title>Effects of Heating Mode and Temperature on the Microstructures, Electrical and Optical Properties of Molybdenum Thin Films</title><title>Materials</title><addtitle>Materials (Basel)</addtitle><description>In this paper, molybdenum (Mo) thin films are deposited on soda-lime glass (SLG) substrates by direct current magnetron sputtering and heated in three different modes at different temperatures, including substrate heating, annealing treatment, and both substrate heating and annealing treatment. The effects of heating temperature and heating mode on the structures, morphology, optical and electrical properties of Mo thin films were systematically investigated by X-ray diffraction (XRD), Scanning electron microscopy (SEM), atomic force microscope (AFM) and UV-visible spectrophotometer (UV-vis spectra). It is shown that as the substrate and annealing temperature increase, the crystallinity of Mo thin films is improved, and the grain sizes become bigger. Especially in the mode of both substrate heating and annealing treatment at higher temperature, the obtained Mo thin films show higher crystallinity and conductivity. Moreover, with the increase of substrate and annealing temperature in different heating modes, both the surface compactness of Mo films and the optical reflectance increase correspondingly. Furthermore, the Mo film, prepared at the substrate heating temperature of 400 °C and annealed at 400 °C, showed excellent comprehensive performance, and the resistivity is as low as 1.36 × 10
Ω·cm. Using this optimized Mo thin film as an electrode, copper indium gallium selenium (CIGS) solar cells have a maximum photo-conversion efficiency of 12.8%.</description><subject>Annealing</subject><subject>Atomic force microscopes</subject><subject>Atomic force microscopy</subject><subject>Copper converters</subject><subject>Copper indium gallium selenides</subject><subject>Crystal structure</subject><subject>Crystallinity</subject><subject>Direct current</subject><subject>Electrical properties</subject><subject>Electrodes</subject><subject>Glass substrates</subject><subject>Grain size</subject><subject>Heating</subject><subject>High temperature</subject><subject>Indium</subject><subject>Magnetron sputtering</subject><subject>Molybdenum</subject><subject>Morphology</subject><subject>Optical properties</subject><subject>Photovoltaic cells</subject><subject>Selenium</subject><subject>Soda-lime glass</subject><subject>Solar cells</subject><subject>Thin films</subject><subject>Zinc oxides</subject><issn>1996-1944</issn><issn>1996-1944</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2018</creationdate><recordtype>article</recordtype><sourceid>ABUWG</sourceid><sourceid>AFKRA</sourceid><sourceid>AZQEC</sourceid><sourceid>BENPR</sourceid><sourceid>CCPQU</sourceid><sourceid>DWQXO</sourceid><recordid>eNpdUU1PGzEUtCqqEqVc-gMqS72gioA_Nt74UglFASoloof0bHm9z8Ro105tb6Xw63ECpYAvfrJnRm9mEPpCyTnnklz0mlIiqeDVBzSiUooJlVV19Go-Ricp3ZNyOKczJj-hY04YIYKxEXpYWAsmJxwsvgGdnb_Dq9AC1r7Fa-i3EHUeIuDgcd4AXjkTQ8pxMPvXdIYXXaFHZ3R3oNxu82H-FUOhZgcH5VXodk0LfujxeuM8vnJdnz6jj1Z3CU6e7zH6fbVYz28my9vrn_PL5cRUROTJ1EoCTT2loha2nrV7Xy3jTQNEgqBW0EpQQ8SMm8ZUjWDSmqqYqtq2Ibye8jH68aS7HZoeWgM-R92pbXS9jjsVtFNvf7zbqLvwV4mSKpvRInD6LBDDnwFSVr1LBrpOewhDUowSxjnjlBXot3fQ-zBEX-wpJkhd8peMFNT3J9Q-yxTBvixDidq3qv63WsBfX6__Av3XIX8EW6ud1A</recordid><startdate>20180906</startdate><enddate>20180906</enddate><creator>Zhao, Haili</creator><creator>Xie, Jingpei</creator><creator>Mao, Aixia</creator><creator>Wang, Aiqin</creator><creator>Chen, Yanfang</creator><creator>Liang, Tingting</creator><creator>Ma, Douqin</creator><general>MDPI AG</general><general>MDPI</general><scope>NPM</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SR</scope><scope>8FD</scope><scope>8FE</scope><scope>8FG</scope><scope>ABJCF</scope><scope>ABUWG</scope><scope>AFKRA</scope><scope>AZQEC</scope><scope>BENPR</scope><scope>BGLVJ</scope><scope>CCPQU</scope><scope>D1I</scope><scope>DWQXO</scope><scope>HCIFZ</scope><scope>JG9</scope><scope>KB.</scope><scope>PDBOC</scope><scope>PIMPY</scope><scope>PQEST</scope><scope>PQQKQ</scope><scope>PQUKI</scope><scope>PRINS</scope><scope>7X8</scope><scope>5PM</scope><orcidid>https://orcid.org/0000-0001-9934-8258</orcidid></search><sort><creationdate>20180906</creationdate><title>Effects of Heating Mode and Temperature on the Microstructures, Electrical and Optical Properties of Molybdenum Thin Films</title><author>Zhao, Haili ; Xie, Jingpei ; Mao, Aixia ; Wang, Aiqin ; Chen, Yanfang ; Liang, Tingting ; Ma, Douqin</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c406t-5f90eb751676f78d1996d23bbe09e61f61461c0683cbc4b629fc4ffe4ddb03753</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2018</creationdate><topic>Annealing</topic><topic>Atomic force microscopes</topic><topic>Atomic force microscopy</topic><topic>Copper converters</topic><topic>Copper indium gallium selenides</topic><topic>Crystal structure</topic><topic>Crystallinity</topic><topic>Direct current</topic><topic>Electrical properties</topic><topic>Electrodes</topic><topic>Glass substrates</topic><topic>Grain size</topic><topic>Heating</topic><topic>High temperature</topic><topic>Indium</topic><topic>Magnetron sputtering</topic><topic>Molybdenum</topic><topic>Morphology</topic><topic>Optical properties</topic><topic>Photovoltaic cells</topic><topic>Selenium</topic><topic>Soda-lime glass</topic><topic>Solar cells</topic><topic>Thin films</topic><topic>Zinc oxides</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Zhao, Haili</creatorcontrib><creatorcontrib>Xie, Jingpei</creatorcontrib><creatorcontrib>Mao, Aixia</creatorcontrib><creatorcontrib>Wang, Aiqin</creatorcontrib><creatorcontrib>Chen, Yanfang</creatorcontrib><creatorcontrib>Liang, Tingting</creatorcontrib><creatorcontrib>Ma, Douqin</creatorcontrib><collection>PubMed</collection><collection>CrossRef</collection><collection>Engineered Materials Abstracts</collection><collection>Technology Research Database</collection><collection>ProQuest SciTech Collection</collection><collection>ProQuest Technology Collection</collection><collection>Materials Science & Engineering Collection</collection><collection>ProQuest Central (Alumni Edition)</collection><collection>ProQuest Central UK/Ireland</collection><collection>ProQuest Central Essentials</collection><collection>ProQuest Central</collection><collection>Technology Collection</collection><collection>ProQuest One Community College</collection><collection>ProQuest Materials Science Collection</collection><collection>ProQuest Central Korea</collection><collection>SciTech Premium Collection</collection><collection>Materials Research Database</collection><collection>Materials Science Database</collection><collection>Materials Science Collection</collection><collection>Publicly Available Content Database</collection><collection>ProQuest One Academic Eastern Edition (DO NOT USE)</collection><collection>ProQuest One Academic</collection><collection>ProQuest One Academic UKI Edition</collection><collection>ProQuest Central China</collection><collection>MEDLINE - Academic</collection><collection>PubMed Central (Full Participant titles)</collection><jtitle>Materials</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Zhao, Haili</au><au>Xie, Jingpei</au><au>Mao, Aixia</au><au>Wang, Aiqin</au><au>Chen, Yanfang</au><au>Liang, Tingting</au><au>Ma, Douqin</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Effects of Heating Mode and Temperature on the Microstructures, Electrical and Optical Properties of Molybdenum Thin Films</atitle><jtitle>Materials</jtitle><addtitle>Materials (Basel)</addtitle><date>2018-09-06</date><risdate>2018</risdate><volume>11</volume><issue>9</issue><spage>1634</spage><pages>1634-</pages><issn>1996-1944</issn><eissn>1996-1944</eissn><abstract>In this paper, molybdenum (Mo) thin films are deposited on soda-lime glass (SLG) substrates by direct current magnetron sputtering and heated in three different modes at different temperatures, including substrate heating, annealing treatment, and both substrate heating and annealing treatment. The effects of heating temperature and heating mode on the structures, morphology, optical and electrical properties of Mo thin films were systematically investigated by X-ray diffraction (XRD), Scanning electron microscopy (SEM), atomic force microscope (AFM) and UV-visible spectrophotometer (UV-vis spectra). It is shown that as the substrate and annealing temperature increase, the crystallinity of Mo thin films is improved, and the grain sizes become bigger. Especially in the mode of both substrate heating and annealing treatment at higher temperature, the obtained Mo thin films show higher crystallinity and conductivity. Moreover, with the increase of substrate and annealing temperature in different heating modes, both the surface compactness of Mo films and the optical reflectance increase correspondingly. Furthermore, the Mo film, prepared at the substrate heating temperature of 400 °C and annealed at 400 °C, showed excellent comprehensive performance, and the resistivity is as low as 1.36 × 10
Ω·cm. Using this optimized Mo thin film as an electrode, copper indium gallium selenium (CIGS) solar cells have a maximum photo-conversion efficiency of 12.8%.</abstract><cop>Switzerland</cop><pub>MDPI AG</pub><pmid>30200622</pmid><doi>10.3390/ma11091634</doi><orcidid>https://orcid.org/0000-0001-9934-8258</orcidid><oa>free_for_read</oa></addata></record> |
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| source | Elektronische Zeitschriftenbibliothek - Frei zugängliche E-Journals; PubMed Central Open Access; MDPI - Multidisciplinary Digital Publishing Institute; PubMed Central; Free Full-Text Journals in Chemistry |
| subjects | Annealing Atomic force microscopes Atomic force microscopy Copper converters Copper indium gallium selenides Crystal structure Crystallinity Direct current Electrical properties Electrodes Glass substrates Grain size Heating High temperature Indium Magnetron sputtering Molybdenum Morphology Optical properties Photovoltaic cells Selenium Soda-lime glass Solar cells Thin films Zinc oxides |
| title | Effects of Heating Mode and Temperature on the Microstructures, Electrical and Optical Properties of Molybdenum Thin Films |
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