Reflective grating-coupled structure improves the detection efficiency of THz array detectors

A reflective grating-coupled structure on the silicon substrate was designed to improve the detection efficiency of terahertz detectors for the frequency ranging from 0.26 THz to 0.36 THz. By using finite difference time domain (FDTD) solutions, the simulation and optimized design of the grating-cou...

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Veröffentlicht in:Scientific reports 2018-05, Vol.8 (1), p.8032-7, Article 8032
Hauptverfasser: Xiao, Peng, Tu, Xuecou, Kang, Lin, Jiang, Chengtao, Zhai, Shimin, Jiang, Zhou, Pan, Danfeng, Chen, Jian, Jia, Xiaoqing, Wu, Peiheng
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container_title Scientific reports
container_volume 8
creator Xiao, Peng
Tu, Xuecou
Kang, Lin
Jiang, Chengtao
Zhai, Shimin
Jiang, Zhou
Pan, Danfeng
Chen, Jian
Jia, Xiaoqing
Wu, Peiheng
description A reflective grating-coupled structure on the silicon substrate was designed to improve the detection efficiency of terahertz detectors for the frequency ranging from 0.26 THz to 0.36 THz. By using finite difference time domain (FDTD) solutions, the simulation and optimized design of the grating-coupled structure were carried out. The results showed that the signal was effectively reflected and diffracted by the reflective grating-coupled structure which significantly enhanced the electric field in the place of the detector. The maximum electric field can be increased by 2.8 times than that of the Fabry-Perot resonator. To verify the design results, the reflective grating-coupled structure was applied in the preparation of the Nb 5 N 6 array detector chip and compared with the Nb 5 N 6 array detector chip with the F-P resonator. The results showed that the maximum voltage responsivity of the Nb 5 N 6 detector with the reflective grating-coupled structure was 2 times larger than the Nb 5 N 6 detector with the F-P resonator. It indicates that the reflective grating-coupled structure can efficiently improve the detection efficiency of THz detectors.
doi_str_mv 10.1038/s41598-018-26204-y
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subjects 132/124
639/301/1005/1009
639/624/400/561
Efficiency
Electric fields
Humanities and Social Sciences
multidisciplinary
Science
Science (multidisciplinary)
Sensors
title Reflective grating-coupled structure improves the detection efficiency of THz array detectors
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