Concave silicon micromirrors for stable hemispherical optical microcavities

A detailed study of the fabrication of silicon concave micromirrors for hemispherical microcavities is presented that includes fabrication yield, surface quality, surface roughness, cavity depth, radius of curvature, and the aspect ratio between the cavity depth and radius of curvature. Most importa...

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Veröffentlicht in:	Optics express 2017-06, Vol.25 (13), p.15493-15503
Hauptverfasser:	Bao, Yiliang, Zhou, Feng, LeBrun, Thomas W, Gorman, Jason J
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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