Contrast of Backscattered Electron SEM Images of Nanoparticles on Substrates with Complex Structure

This study is concerned with backscattered electron scanning electron microscopy (BSE SEM) contrast of complex nanoscaled samples which consist of SiO2 nanoparticles (NPs) deposited on indium-tin-oxide covered bulk SiO2 and glassy carbon substrates. BSE SEM contrast of NPs is studied as function of...

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Veröffentlicht in:	Scanning 2017-01, Vol.2017 (2017), p.1-12
Hauptverfasser:	Gerthsen, Dagmar, Störmer, Heike, Hettler, Simon, Fritsch-Decker, Susanne, Müller, Erich, Kowoll, Thomas, Weiss, Carsten
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied physics Backscattering Carbon Computer simulation Electron energy Electrons Energy Glassy carbon Gold Image contrast Indium tin oxides Inversions Investigations Monte Carlo simulation Nanoparticles Scanning electron microscopy Sensors Silicon dioxide Simulation Substrates Thin films Topography
Online-Zugang:	Volltext
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