Study of Ni Metallization in Macroporous Si Using Wet Chemistry for Radio Frequency Cross-Talk Isolation in Mixed Signal Integrated Circuits

A highly conductive moat or Faraday cage of through-the-wafer thickness in Si substrate was proposed to be effective in shielding electromagnetic interference thereby reducing radio frequency (RF) cross-talk in high performance mixed signal integrated circuits. Such a structure was realized by metal...

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Veröffentlicht in:	Materials 2011-05, Vol.4 (6), p.952-962
Hauptverfasser:	Zhang, Xi, Xu, Chengkun, Chong, Kyuchul, Tu, King-Ning, Xie, Ya-Hong
Format:	Artikel
Sprache:	eng
Schlagworte:	Chemistry Electrodes Fluorides Integrated circuits Plating Radio frequency Semiconductors
Online-Zugang:	Volltext
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