Composition Analysis of III-Nitrides at the Nanometer Scale: Comparison of Energy Dispersive X-ray Spectroscopy and Atom Probe Tomography

The enhancement of the performance of advanced nitride-based optoelectronic devices requires the fine tuning of their composition, which has to be determined with a high accuracy and at the nanometer scale. For that purpose, we have evaluated and compared energy dispersive X-ray spectroscopy (EDX) i...

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Veröffentlicht in:	Nanoscale research letters 2016-12, Vol.11 (1), p.461-6, Article 461
Hauptverfasser:	Bonef, Bastien, Lopez-Haro, Miguel, Amichi, Lynda, Beeler, Mark, Grenier, Adeline, Robin, Eric, Jouneau, Pierre-Henri, Mollard, Nicolas, Mouton, Isabelle, Haas, Benedikt, Monroy, Eva, Bougerol, Catherine
Format:	Artikel
Sprache:	eng
Schlagworte:	Atom probe analysis Atomic beam spectroscopy Chemistry and Materials Science Condensed Matter Energy dispersive x-ray spectroscopy Materials Science Molecular Medicine Multilayers Nano Express Nanochemistry Nanoscale Science and Technology Nanostructure Nanotechnology Nanotechnology and Microengineering Physics Scanning electron microscopy Tomography Tuning
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