Composition Analysis of III-Nitrides at the Nanometer Scale: Comparison of Energy Dispersive X-ray Spectroscopy and Atom Probe Tomography
The enhancement of the performance of advanced nitride-based optoelectronic devices requires the fine tuning of their composition, which has to be determined with a high accuracy and at the nanometer scale. For that purpose, we have evaluated and compared energy dispersive X-ray spectroscopy (EDX) i...
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| Veröffentlicht in: | Nanoscale research letters 2016-12, Vol.11 (1), p.461-6, Article 461 |
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| creator | Bonef, Bastien Lopez-Haro, Miguel Amichi, Lynda Beeler, Mark Grenier, Adeline Robin, Eric Jouneau, Pierre-Henri Mollard, Nicolas Mouton, Isabelle Haas, Benedikt Monroy, Eva Bougerol, Catherine |
| description | The enhancement of the performance of advanced nitride-based optoelectronic devices requires the fine tuning of their composition, which has to be determined with a high accuracy and at the nanometer scale. For that purpose, we have evaluated and compared energy dispersive X-ray spectroscopy (EDX) in a scanning transmission electron microscope (STEM) and atom probe tomography (APT) in terms of composition analysis of AlGaN/GaN multilayers. Both techniques give comparable results with a composition accuracy better than 0.6% even for layers as thin as 3 nm. In case of EDX, we show the relevance of correcting the X-ray absorption by simultaneous determination of the mass thickness and chemical composition at each point of the analysis. Limitations of both techniques are discussed when applied to specimens with different geometries or compositions. |
| doi_str_mv | 10.1186/s11671-016-1668-2 |
| format | Article |
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For that purpose, we have evaluated and compared energy dispersive X-ray spectroscopy (EDX) in a scanning transmission electron microscope (STEM) and atom probe tomography (APT) in terms of composition analysis of AlGaN/GaN multilayers. Both techniques give comparable results with a composition accuracy better than 0.6% even for layers as thin as 3 nm. In case of EDX, we show the relevance of correcting the X-ray absorption by simultaneous determination of the mass thickness and chemical composition at each point of the analysis. Limitations of both techniques are discussed when applied to specimens with different geometries or compositions.</description><identifier>ISSN: 1931-7573</identifier><identifier>EISSN: 1556-276X</identifier><identifier>DOI: 10.1186/s11671-016-1668-2</identifier><identifier>PMID: 27757941</identifier><language>eng</language><publisher>New York: Springer US</publisher><subject>Atom probe analysis ; Atomic beam spectroscopy ; Chemistry and Materials Science ; Condensed Matter ; Energy dispersive x-ray spectroscopy ; Materials Science ; Molecular Medicine ; Multilayers ; Nano Express ; Nanochemistry ; Nanoscale Science and Technology ; Nanostructure ; Nanotechnology ; Nanotechnology and Microengineering ; Physics ; Scanning electron microscopy ; Tomography ; Tuning</subject><ispartof>Nanoscale research letters, 2016-12, Vol.11 (1), p.461-6, Article 461</ispartof><rights>The Author(s). 2016</rights><rights>Nanoscale Research Letters is a copyright of Springer, 2016.</rights><rights>Attribution</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c636t-f5e8c9e68bf0e33edc062f11f19eb3eb9004083418aeb592c1ccdc7ec3d06b103</citedby><cites>FETCH-LOGICAL-c636t-f5e8c9e68bf0e33edc062f11f19eb3eb9004083418aeb592c1ccdc7ec3d06b103</cites><orcidid>0000-0002-1024-6747 ; 0000-0002-4823-0919 ; 0000-0002-5596-2640 ; 0000-0001-5481-3267 ; 0000-0003-0350-4901</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://www.ncbi.nlm.nih.gov/pmc/articles/PMC5069209/pdf/$$EPDF$$P50$$Gpubmedcentral$$Hfree_for_read</linktopdf><linktohtml>$$Uhttps://www.ncbi.nlm.nih.gov/pmc/articles/PMC5069209/$$EHTML$$P50$$Gpubmedcentral$$Hfree_for_read</linktohtml><link.rule.ids>230,314,723,776,780,860,881,27901,27902,53766,53768</link.rule.ids><backlink>$$Uhttps://www.ncbi.nlm.nih.gov/pubmed/27757941$$D View this record in MEDLINE/PubMed$$Hfree_for_read</backlink><backlink>$$Uhttps://hal.science/hal-01385434$$DView record in HAL$$Hfree_for_read</backlink></links><search><creatorcontrib>Bonef, Bastien</creatorcontrib><creatorcontrib>Lopez-Haro, Miguel</creatorcontrib><creatorcontrib>Amichi, Lynda</creatorcontrib><creatorcontrib>Beeler, Mark</creatorcontrib><creatorcontrib>Grenier, Adeline</creatorcontrib><creatorcontrib>Robin, Eric</creatorcontrib><creatorcontrib>Jouneau, Pierre-Henri</creatorcontrib><creatorcontrib>Mollard, Nicolas</creatorcontrib><creatorcontrib>Mouton, Isabelle</creatorcontrib><creatorcontrib>Haas, Benedikt</creatorcontrib><creatorcontrib>Monroy, Eva</creatorcontrib><creatorcontrib>Bougerol, Catherine</creatorcontrib><title>Composition Analysis of III-Nitrides at the Nanometer Scale: Comparison of Energy Dispersive X-ray Spectroscopy and Atom Probe Tomography</title><title>Nanoscale research letters</title><addtitle>Nanoscale Res Lett</addtitle><addtitle>Nanoscale Res Lett</addtitle><description>The enhancement of the performance of advanced nitride-based optoelectronic devices requires the fine tuning of their composition, which has to be determined with a high accuracy and at the nanometer scale. 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Limitations of both techniques are discussed when applied to specimens with different geometries or compositions.</description><subject>Atom probe analysis</subject><subject>Atomic beam spectroscopy</subject><subject>Chemistry and Materials Science</subject><subject>Condensed Matter</subject><subject>Energy dispersive x-ray spectroscopy</subject><subject>Materials Science</subject><subject>Molecular Medicine</subject><subject>Multilayers</subject><subject>Nano Express</subject><subject>Nanochemistry</subject><subject>Nanoscale Science and Technology</subject><subject>Nanostructure</subject><subject>Nanotechnology</subject><subject>Nanotechnology and Microengineering</subject><subject>Physics</subject><subject>Scanning electron 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Access)</collection><collection>PubMed Central (Full Participant titles)</collection><jtitle>Nanoscale research letters</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Bonef, Bastien</au><au>Lopez-Haro, Miguel</au><au>Amichi, Lynda</au><au>Beeler, Mark</au><au>Grenier, Adeline</au><au>Robin, Eric</au><au>Jouneau, Pierre-Henri</au><au>Mollard, Nicolas</au><au>Mouton, Isabelle</au><au>Haas, Benedikt</au><au>Monroy, Eva</au><au>Bougerol, Catherine</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Composition Analysis of III-Nitrides at the Nanometer Scale: Comparison of Energy Dispersive X-ray Spectroscopy and Atom Probe Tomography</atitle><jtitle>Nanoscale research letters</jtitle><stitle>Nanoscale Res Lett</stitle><addtitle>Nanoscale Res 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For that purpose, we have evaluated and compared energy dispersive X-ray spectroscopy (EDX) in a scanning transmission electron microscope (STEM) and atom probe tomography (APT) in terms of composition analysis of AlGaN/GaN multilayers. Both techniques give comparable results with a composition accuracy better than 0.6% even for layers as thin as 3 nm. In case of EDX, we show the relevance of correcting the X-ray absorption by simultaneous determination of the mass thickness and chemical composition at each point of the analysis. 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| subjects | Atom probe analysis Atomic beam spectroscopy Chemistry and Materials Science Condensed Matter Energy dispersive x-ray spectroscopy Materials Science Molecular Medicine Multilayers Nano Express Nanochemistry Nanoscale Science and Technology Nanostructure Nanotechnology Nanotechnology and Microengineering Physics Scanning electron microscopy Tomography Tuning |
| title | Composition Analysis of III-Nitrides at the Nanometer Scale: Comparison of Energy Dispersive X-ray Spectroscopy and Atom Probe Tomography |
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