Comb-referenced laser distance interferometer for industrial nanotechnology

A prototype laser distance interferometer is demonstrated by incorporating the frequency comb of a femtosecond laser for mass-production of optoelectronic devices such as flat panel displays and solar cell devices. This comb-referenced interferometer uses four different wavelengths simultaneously to...

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Veröffentlicht in:	Scientific reports 2016-08, Vol.6 (1), p.31770-31770, Article 31770
Hauptverfasser:	Jang, Yoon-Soo, Wang, Guochao, Hyun, Sangwon, Kang, Hyun Jay, Chun, Byung Jae, Kim, Young-Jin, Kim, Seung-Woo
Format:	Artikel
Sprache:	eng
Schlagworte:	132/124 639/624/1075/1083 639/624/1075/401 Flat panel displays Humanities and Social Sciences Lasers multidisciplinary Nanotechnology Science Science (multidisciplinary) Solar cells Vacuum Wavelengths
Online-Zugang:	Volltext
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