Frequency fluctuations in silicon nanoresonators

Frequency stability is key to the performance of nanoresonators. This stability is thought to reach a limit with the resonator's ability to resolve thermally induced vibrations. Although measurements and predictions of resonator stability usually disregard fluctuations in the mechanical frequen...

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Veröffentlicht in:	Nature nanotechnology 2016-06, Vol.11 (6), p.552-558
Hauptverfasser:	Sansa, Marc, Sage, Eric, Bullard, Elizabeth C., Gély, Marc, Alava, Thomas, Colinet, Eric, Naik, Akshay K., Villanueva, Luis Guillermo, Duraffourg, Laurent, Roukes, Michael L., Jourdan, Guillaume, Hentz, Sébastien
Format:	Artikel
Sprache:	eng
Schlagworte:	639/925/927 639/925/930 Fluctuation Fluctuations Frequency dependence Frequency response Frequency stability Instrumentation Literature reviews Materials Science Nanostructure Nanotechnology Nanotechnology and Microengineering Resonators Silicon Stability Vibration Vibrations
Online-Zugang:	Volltext
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