Rapid Stencil Mask Fabrication Enabled One-Step Polymer-Free Graphene Patterning and Direct Transfer for Flexible Graphene Devices

We report a one-step polymer-free approach to patterning graphene using a stencil mask and oxygen plasma reactive-ion etching, with a subsequent polymer-free direct transfer for flexible graphene devices. Our stencil mask is fabricated via a subtractive, laser cutting manufacturing technique, follow...

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Veröffentlicht in:	Scientific reports 2016-04, Vol.6 (1), p.24890-24890, Article 24890
Hauptverfasser:	Yong, Keong, Ashraf, Ali, Kang, Pilgyu, Nam, SungWoo
Format:	Artikel
Sprache:	eng
Schlagworte:	140/133 142/126 639/301/1005/1007 639/925/918/1053 Contact angle Etching Fabrication Heat transfer Humanities and Social Sciences Lamination multidisciplinary Polymers Raman spectroscopy Science Spectroscopy
Online-Zugang:	Volltext
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