High‐resolution, high‐throughput imaging with a multibeam scanning electron microscope

Summary Electron–electron interactions and detector bandwidth limit the maximal imaging speed of single‐beam scanning electron microscopes. We use multiple electron beams in a single column and detect secondary electrons in parallel to increase the imaging speed by close to two orders of magnitude a...

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Veröffentlicht in:	Journal of microscopy (Oxford) 2015-08, Vol.259 (2), p.114-120
Hauptverfasser:	EBERLE, A.L., MIKULA, S., SCHALEK, R., LICHTMAN, J., TATE, M.L. KNOTHE, ZEIDLER, D.
Format:	Artikel
Sprache:	eng
Schlagworte:	Animals Brain - ultrastructure Electron microscopes Electrons High‐throughput imaging Mice Microscopy, Electron, Scanning - instrumentation Microscopy, Electron, Scanning - methods multibeam parallel data acquisition Scanning electron microscopy Semiconductors Themed Issue Papers
Online-Zugang:	Volltext
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