Macropore formation in p-type silicon: toward the modeling of morphology

The formation of macropores in silicon during electrochemical etching processes has attracted much interest. Experimental evidences indicate that charge transport in silicon and in the electrolyte should realistically be taken into account in order to be able to describe the macropore morphology. Ho...

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Veröffentlicht in:	Nanoscale research letters 2014-10, Vol.9 (1), p.585-585, Article 585
Hauptverfasser:	Slimani, Amel, Iratni, Aicha, Henry, Hervé, Plapp, Mathis, Chazalviel, Jean-Noël, Ozanam, François, Gabouze, Noureddine
Format:	Artikel
Sprache:	eng
Schlagworte:	Chemistry and Materials Science Materials Science Molecular Medicine Nano Idea Nanochemistry Nanoscale Science and Technology Nanotechnology Nanotechnology and Microengineering Porous Semiconductors - Science and Technology PSST2014
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