Capacitive micromachined ultrasonic transducer arrays as tunable acoustic metamaterials
Capacitive Micromachined Ultrasonic Transducers (CMUTs) operating in immersion support dispersive evanescent waves due to the subwavelength periodic structure of electrostatically actuated membranes in the array. Evanescent wave characteristics also depend on the membrane resonance which is modified...
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| Veröffentlicht in: | Applied physics letters 2014-02, Vol.104 (5), p.051914-051914 |
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| container_end_page | 051914 |
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| container_issue | 5 |
| container_start_page | 051914 |
| container_title | Applied physics letters |
| container_volume | 104 |
| creator | Lani, Shane W Wasequr Rashid, M Hasler, Jennifer Sabra, Karim G Levent Degertekin, F |
| description | Capacitive Micromachined Ultrasonic Transducers (CMUTs) operating in immersion support dispersive evanescent waves due to the subwavelength periodic structure of electrostatically actuated membranes in the array. Evanescent wave characteristics also depend on the membrane resonance which is modified by the externally applied bias voltage, offering a mechanism to tune the CMUT array as an acoustic metamaterial. The dispersion and tunability characteristics are examined using a computationally efficient, mutual radiation impedance based approach to model a finite-size array and realistic parameters of variation. The simulations are verified, and tunability is demonstrated by experiments on a linear CMUT array operating in 2-12 MHz range. |
| doi_str_mv | 10.1063/1.4864635 |
| format | Article |
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Evanescent wave characteristics also depend on the membrane resonance which is modified by the externally applied bias voltage, offering a mechanism to tune the CMUT array as an acoustic metamaterial. The dispersion and tunability characteristics are examined using a computationally efficient, mutual radiation impedance based approach to model a finite-size array and realistic parameters of variation. 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Evanescent wave characteristics also depend on the membrane resonance which is modified by the externally applied bias voltage, offering a mechanism to tune the CMUT array as an acoustic metamaterial. The dispersion and tunability characteristics are examined using a computationally efficient, mutual radiation impedance based approach to model a finite-size array and realistic parameters of variation. The simulations are verified, and tunability is demonstrated by experiments on a linear CMUT array operating in 2-12 MHz range.</description><subject>Applied physics</subject><subject>Arrays</subject><subject>Computer simulation</subject><subject>CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY</subject><subject>ELECTRIC POTENTIAL</subject><subject>Evanescent waves</subject><subject>IMPEDANCE</subject><subject>MEMBRANES</subject><subject>Metamaterials</subject><subject>Micromachining</subject><subject>NANOSCIENCE AND NANOTECHNOLOGY</subject><subject>NANOSTRUCTURES</subject><subject>Periodic structures</subject><subject>PERIODICITY</subject><subject>Structural, Mechanical, Optical, and Thermodynamic Properties of Advanced Materials</subject><subject>Submerging</subject><subject>TRANSDUCERS</subject><subject>Ultrasonic transducers</subject><subject>ULTRASONIC WAVES</subject><issn>0003-6951</issn><issn>1077-3118</issn><issn>0003-6951</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2014</creationdate><recordtype>article</recordtype><recordid>eNpVkUuLFDEUhYMoTtu68A9IgRtd1ExelVRtBGl8DAy4GXEZktQtO0NV0iapgfn3Xum2dVZ5fZzccw4hrxm9ZFSJK3YpeyWV6J6QDaNat4Kx_inZUEpFq4aOXZAXpdzhseNCPCcXXOpOKC425MfOHqwPNdxDswSf02L9PkQYm3Wu2ZYUg29wE8u4esiNzdk-lMaWpq7Ruhka69NaKlILVLvYCjnYubwkzyZc4NVp3ZLvnz_d7r62N9--XO8-3rReDrq2zktJp154KUZAE06CGpjiwF1PmWfgtBwmLad-mISyXdeNzMEEwjmNd1RsyYej7mF1C4weIg47m0MOi80PJtlgHr_EsDc_070Rg9a6lyjw9iiQ0IQpGAX4vU8xgq-Gc94LjhFvybvTNzn9WqFUs4TiYZ5tBLRvWM9VN3AU_Sd4Ru_SmiOGYDjjWmM_jCH1_khh5KVkmM4jM2r-lGqYOZWK7Jv_PZ7Jvy2K30JCnU0</recordid><startdate>20140203</startdate><enddate>20140203</enddate><creator>Lani, Shane W</creator><creator>Wasequr Rashid, M</creator><creator>Hasler, Jennifer</creator><creator>Sabra, Karim G</creator><creator>Levent Degertekin, F</creator><general>American Institute of Physics</general><general>AIP Publishing LLC</general><scope>NPM</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>8FD</scope><scope>H8D</scope><scope>L7M</scope><scope>7X8</scope><scope>OTOTI</scope><scope>5PM</scope></search><sort><creationdate>20140203</creationdate><title>Capacitive micromachined ultrasonic transducer arrays as tunable acoustic metamaterials</title><author>Lani, Shane W ; Wasequr Rashid, M ; Hasler, Jennifer ; Sabra, Karim G ; Levent Degertekin, F</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c497t-bc440f83c43de486b4e69162e2b801c1eb749f74f89f36a555d1befe3bb7f8903</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2014</creationdate><topic>Applied physics</topic><topic>Arrays</topic><topic>Computer simulation</topic><topic>CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY</topic><topic>ELECTRIC POTENTIAL</topic><topic>Evanescent waves</topic><topic>IMPEDANCE</topic><topic>MEMBRANES</topic><topic>Metamaterials</topic><topic>Micromachining</topic><topic>NANOSCIENCE AND NANOTECHNOLOGY</topic><topic>NANOSTRUCTURES</topic><topic>Periodic structures</topic><topic>PERIODICITY</topic><topic>Structural, Mechanical, Optical, and Thermodynamic Properties of Advanced Materials</topic><topic>Submerging</topic><topic>TRANSDUCERS</topic><topic>Ultrasonic transducers</topic><topic>ULTRASONIC WAVES</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Lani, Shane W</creatorcontrib><creatorcontrib>Wasequr Rashid, M</creatorcontrib><creatorcontrib>Hasler, Jennifer</creatorcontrib><creatorcontrib>Sabra, Karim G</creatorcontrib><creatorcontrib>Levent Degertekin, F</creatorcontrib><collection>PubMed</collection><collection>CrossRef</collection><collection>Technology Research Database</collection><collection>Aerospace Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>MEDLINE - Academic</collection><collection>OSTI.GOV</collection><collection>PubMed Central (Full Participant titles)</collection><jtitle>Applied physics letters</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Lani, Shane W</au><au>Wasequr Rashid, M</au><au>Hasler, Jennifer</au><au>Sabra, Karim G</au><au>Levent Degertekin, F</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Capacitive micromachined ultrasonic transducer arrays as tunable acoustic metamaterials</atitle><jtitle>Applied physics letters</jtitle><addtitle>Appl Phys Lett</addtitle><date>2014-02-03</date><risdate>2014</risdate><volume>104</volume><issue>5</issue><spage>051914</spage><epage>051914</epage><pages>051914-051914</pages><issn>0003-6951</issn><eissn>1077-3118</eissn><eissn>0003-6951</eissn><abstract>Capacitive Micromachined Ultrasonic Transducers (CMUTs) operating in immersion support dispersive evanescent waves due to the subwavelength periodic structure of electrostatically actuated membranes in the array. Evanescent wave characteristics also depend on the membrane resonance which is modified by the externally applied bias voltage, offering a mechanism to tune the CMUT array as an acoustic metamaterial. The dispersion and tunability characteristics are examined using a computationally efficient, mutual radiation impedance based approach to model a finite-size array and realistic parameters of variation. The simulations are verified, and tunability is demonstrated by experiments on a linear CMUT array operating in 2-12 MHz range.</abstract><cop>United States</cop><pub>American Institute of Physics</pub><pmid>24753623</pmid><doi>10.1063/1.4864635</doi><tpages>1</tpages><oa>free_for_read</oa></addata></record> |
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| ispartof | Applied physics letters, 2014-02, Vol.104 (5), p.051914-051914 |
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| language | eng |
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| source | AIP Journals Complete; Alma/SFX Local Collection |
| subjects | Applied physics Arrays Computer simulation CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY ELECTRIC POTENTIAL Evanescent waves IMPEDANCE MEMBRANES Metamaterials Micromachining NANOSCIENCE AND NANOTECHNOLOGY NANOSTRUCTURES Periodic structures PERIODICITY Structural, Mechanical, Optical, and Thermodynamic Properties of Advanced Materials Submerging TRANSDUCERS Ultrasonic transducers ULTRASONIC WAVES |
| title | Capacitive micromachined ultrasonic transducer arrays as tunable acoustic metamaterials |
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