Electromechanical performance of piezoelectric scanning mirrors for medical endoscopy

The electromechanical performance of piezoelectric scanning mirrors for endoscopy imaging is presented. The devices are supported by a single actuating cantilever to achieve a high fill factor, the ratio of mirror area to the combined mirror and actuator area. The largest fill factor devices (74%) a...

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Veröffentlicht in:Sensors and actuators. A. Physical. 2012-05, Vol.178, p.193-201
Hauptverfasser: Gilchrist, Kristin H., Dausch, David E., Grego, Sonia
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Sprache:eng
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