Optofluidic notch filter integration by lift-off of thin films

Optofluidic notch filter integration by lift-off of thin films

Optofluidic platforms used for biomolecular detection require spectral filtering for distinguishing analyte signals from unwanted background. Towards a fully integrated platform, an on-chip filter is required. Selective deposition of dielectric thin films on an optofluidic sensor based on antiresona...

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Veröffentlicht in:Optics express 2010-03, Vol.18 (5), p.4790-4795
Hauptverfasser: Phillips, Brian S, Measor, Philip, Zhao, Yue, Schmidt, Holger, Hawkins, Aaron R
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container_issue 5
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container_title Optics express
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creator Phillips, Brian S
Measor, Philip
Zhao, Yue
Schmidt, Holger
Hawkins, Aaron R
description Optofluidic platforms used for biomolecular detection require spectral filtering for distinguishing analyte signals from unwanted background. Towards a fully integrated platform, an on-chip filter is required. Selective deposition of dielectric thin films on an optofluidic sensor based on antiresonant reflecting optical waveguide (ARROW) technology provides the means for localized, on-chip optical filtering. We present a lift-off technique, compatible with thin-film processing including plasma-enhanced chemical vapor and sputtering deposition. The resulting optofluidic notch filters exhibited a 20 dB rejection with linewidths as low as 20 nm for approximately 1 cm long chips consisting of liquid-core and solid-core waveguides.
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title Optofluidic notch filter integration by lift-off of thin films
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