Self-separated PZT thick films with bulk-like piezoelectric and electromechanical properties

Self-separated Pb(Zr0.52Ti0.48)O3 (PZT) films were processed by a hydrothermal deposition and a rapid thermal separation method, followed by a sol–gel filling and sintering process. The films possess excellent piezoelectric and electromechanical properties close to those of bulk material. The maximu...

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Veröffentlicht in:Journal of materials research 2011-06, Vol.26 (11), p.1431-1435
Hauptverfasser: Su, Qing, Zhu, Benpeng, Lee, Joon Hwan, Bi, Zhenxing, Shung, Kirk, Zhou, Qifa, Takeuchi, Shinichi, Park, Bae Ho, Jia, Quanxi, Wang, Haiyan
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Sprache:eng
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