Fabrication, Microstructure and Plasma Resistance Behavior of Y-Al-Si-O (YAS) Glass-Ceramics Coated on Alumina Ceramics
This study investigates the fabrication, microstructural characteristics and plasma resistance of Y-Al-Si-O (YAS) glass-ceramics coated on alumina ceramics. YAS frits were initially prepared using a melt-quenching method, then homogenously milled and coated onto alumina ceramics. The melt-coating pr...
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| creator | Park, Eui Keun Jang, Hwan-Yoon Jeon, Seo-Yeon Raju, Kati Lee, Hyun-Kwuon |
| description | This study investigates the fabrication, microstructural characteristics and plasma resistance of Y-Al-Si-O (YAS) glass-ceramics coated on alumina ceramics. YAS frits were initially prepared using a melt-quenching method, then homogenously milled and coated onto alumina ceramics. The melt-coating process was conducted at 1650 °C for 1 h. The composition and microstructure of the glass frits and coatings were thoroughly characterized using X-ray diffraction, scanning electron microscopy, and energy-dispersive X-ray spectroscopy. These analyses revealed a dense microstructure with a polycrystalline structure predominantly composed of Y
Al
O
(YAG) phase and a minor phase of Y
Si
O
. The YAS coatings on alumina revealed a dense layer with strong adhesion to the substrate. Subsequently, the coatings underwent C
F
/Ar/O
plasma treatment for 1 h. Plasma exposure tests demonstrated that the YAS-coated alumina exhibited significantly better etching resistance compared to uncoated alumina, with minimal surface damage observed on the YAS coating, confirming its protective properties against plasma. The superior plasma resistance of YAS coatings is attributed to the predominance of its YAG phase. This research offers a more stable and cost-efficient solution for protecting ceramics in demanding plasma environments. |
| doi_str_mv | 10.3390/ma17184585 |
| format | Article |
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Al
O
(YAG) phase and a minor phase of Y
Si
O
. The YAS coatings on alumina revealed a dense layer with strong adhesion to the substrate. Subsequently, the coatings underwent C
F
/Ar/O
plasma treatment for 1 h. Plasma exposure tests demonstrated that the YAS-coated alumina exhibited significantly better etching resistance compared to uncoated alumina, with minimal surface damage observed on the YAS coating, confirming its protective properties against plasma. The superior plasma resistance of YAS coatings is attributed to the predominance of its YAG phase. This research offers a more stable and cost-efficient solution for protecting ceramics in demanding plasma environments.</description><identifier>ISSN: 1996-1944</identifier><identifier>EISSN: 1996-1944</identifier><identifier>DOI: 10.3390/ma17184585</identifier><identifier>PMID: 39336326</identifier><language>eng</language><publisher>Switzerland: MDPI AG</publisher><subject>Adhesive strength ; Aerosols ; Alumina ; Aluminum ; Aluminum oxide ; Ceramic glazes ; Ceramics ; Corrosion resistance ; Glass ceramics ; Integrated circuit fabrication ; Integrated circuits ; Microstructure ; Minimal surfaces ; Oxygen plasma ; Plasma etching ; Protective coatings ; Semiconductor production equipment ; Silicon ; Substrates ; Temperature ; Yttrium ; Yttrium-aluminum garnet</subject><ispartof>Materials, 2024-09, Vol.17 (18), p.4585</ispartof><rights>COPYRIGHT 2024 MDPI AG</rights><rights>2024 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). Notwithstanding the ProQuest Terms and Conditions, you may use this content in accordance with the terms of the License.</rights><rights>2024 by the authors. 2024</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><cites>FETCH-LOGICAL-c335t-a3d05290b7f7701a6eca80fddac4d1d27bb1ffe35447ea15e46cad09df72fa3d3</cites><orcidid>0009-0001-1097-0639 ; 0000-0002-0853-5574</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://www.ncbi.nlm.nih.gov/pmc/articles/PMC11432973/pdf/$$EPDF$$P50$$Gpubmedcentral$$Hfree_for_read</linktopdf><linktohtml>$$Uhttps://www.ncbi.nlm.nih.gov/pmc/articles/PMC11432973/$$EHTML$$P50$$Gpubmedcentral$$Hfree_for_read</linktohtml><link.rule.ids>230,314,723,776,780,881,27903,27904,53769,53771</link.rule.ids><backlink>$$Uhttps://www.ncbi.nlm.nih.gov/pubmed/39336326$$D View this record in MEDLINE/PubMed$$Hfree_for_read</backlink></links><search><creatorcontrib>Park, Eui Keun</creatorcontrib><creatorcontrib>Jang, Hwan-Yoon</creatorcontrib><creatorcontrib>Jeon, Seo-Yeon</creatorcontrib><creatorcontrib>Raju, Kati</creatorcontrib><creatorcontrib>Lee, Hyun-Kwuon</creatorcontrib><title>Fabrication, Microstructure and Plasma Resistance Behavior of Y-Al-Si-O (YAS) Glass-Ceramics Coated on Alumina Ceramics</title><title>Materials</title><addtitle>Materials (Basel)</addtitle><description>This study investigates the fabrication, microstructural characteristics and plasma resistance of Y-Al-Si-O (YAS) glass-ceramics coated on alumina ceramics. YAS frits were initially prepared using a melt-quenching method, then homogenously milled and coated onto alumina ceramics. The melt-coating process was conducted at 1650 °C for 1 h. The composition and microstructure of the glass frits and coatings were thoroughly characterized using X-ray diffraction, scanning electron microscopy, and energy-dispersive X-ray spectroscopy. These analyses revealed a dense microstructure with a polycrystalline structure predominantly composed of Y
Al
O
(YAG) phase and a minor phase of Y
Si
O
. The YAS coatings on alumina revealed a dense layer with strong adhesion to the substrate. Subsequently, the coatings underwent C
F
/Ar/O
plasma treatment for 1 h. Plasma exposure tests demonstrated that the YAS-coated alumina exhibited significantly better etching resistance compared to uncoated alumina, with minimal surface damage observed on the YAS coating, confirming its protective properties against plasma. The superior plasma resistance of YAS coatings is attributed to the predominance of its YAG phase. This research offers a more stable and cost-efficient solution for protecting ceramics in demanding plasma environments.</description><subject>Adhesive strength</subject><subject>Aerosols</subject><subject>Alumina</subject><subject>Aluminum</subject><subject>Aluminum oxide</subject><subject>Ceramic glazes</subject><subject>Ceramics</subject><subject>Corrosion resistance</subject><subject>Glass ceramics</subject><subject>Integrated circuit fabrication</subject><subject>Integrated circuits</subject><subject>Microstructure</subject><subject>Minimal surfaces</subject><subject>Oxygen plasma</subject><subject>Plasma etching</subject><subject>Protective coatings</subject><subject>Semiconductor production equipment</subject><subject>Silicon</subject><subject>Substrates</subject><subject>Temperature</subject><subject>Yttrium</subject><subject>Yttrium-aluminum garnet</subject><issn>1996-1944</issn><issn>1996-1944</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2024</creationdate><recordtype>article</recordtype><sourceid>ABUWG</sourceid><sourceid>AFKRA</sourceid><sourceid>AZQEC</sourceid><sourceid>BENPR</sourceid><sourceid>CCPQU</sourceid><sourceid>DWQXO</sourceid><recordid>eNpdkk1vFSEUhidGY5vajT_AkLipxqkwMMNlZcYbW01qaqwuuiJn4NDSzECFmRr_vVxvW6uwgHCe93C-quo5o4ecK_p2AibZSrSr9lG1y5TqaqaEePzgvlPt53xFy-KcrRr1tNrhivOON91u9fMIhuQNzD6GN-SzNynmOS1mXhISCJZ8GSFPQL5i9nmGYJC8x0u48TGR6Mh53Y_1ma9PycF5f_aKHBc612tMMHmTyTrCjJbEQPpxmXwAcmd6Vj1xMGbcvz33qu9HH76tP9Ynp8ef1v1JbThv5xq4pW2j6CCdlJRBhwZW1FkLRlhmGzkMzDnkrRASgbUoOgOWKutk44qY71Xvtn6vl2FCazDMCUZ9nfwE6ZeO4PW_luAv9UW80YwJ3ijJi4eDWw8p_lgwz3ry2eA4QsC4ZM0Zo4qV4oqCvvwPvYpLCiW_P1SrZCdkoQ631AWMqH1wsXxsyrZYKhMDOl_e-xUrEqHaTQSvt4JNc3JCdx8-o3ozBPrvEBT4xcOE79G7lvPfnC6sWw</recordid><startdate>20240918</startdate><enddate>20240918</enddate><creator>Park, Eui Keun</creator><creator>Jang, Hwan-Yoon</creator><creator>Jeon, Seo-Yeon</creator><creator>Raju, Kati</creator><creator>Lee, Hyun-Kwuon</creator><general>MDPI AG</general><general>MDPI</general><scope>NPM</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SR</scope><scope>8FD</scope><scope>8FE</scope><scope>8FG</scope><scope>ABJCF</scope><scope>ABUWG</scope><scope>AFKRA</scope><scope>AZQEC</scope><scope>BENPR</scope><scope>BGLVJ</scope><scope>CCPQU</scope><scope>D1I</scope><scope>DWQXO</scope><scope>HCIFZ</scope><scope>JG9</scope><scope>KB.</scope><scope>PDBOC</scope><scope>PIMPY</scope><scope>PQEST</scope><scope>PQQKQ</scope><scope>PQUKI</scope><scope>PRINS</scope><scope>7X8</scope><scope>5PM</scope><orcidid>https://orcid.org/0009-0001-1097-0639</orcidid><orcidid>https://orcid.org/0000-0002-0853-5574</orcidid></search><sort><creationdate>20240918</creationdate><title>Fabrication, Microstructure and Plasma Resistance Behavior of Y-Al-Si-O (YAS) Glass-Ceramics Coated on Alumina Ceramics</title><author>Park, Eui Keun ; Jang, Hwan-Yoon ; Jeon, Seo-Yeon ; Raju, Kati ; Lee, Hyun-Kwuon</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c335t-a3d05290b7f7701a6eca80fddac4d1d27bb1ffe35447ea15e46cad09df72fa3d3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2024</creationdate><topic>Adhesive strength</topic><topic>Aerosols</topic><topic>Alumina</topic><topic>Aluminum</topic><topic>Aluminum oxide</topic><topic>Ceramic glazes</topic><topic>Ceramics</topic><topic>Corrosion resistance</topic><topic>Glass ceramics</topic><topic>Integrated circuit fabrication</topic><topic>Integrated circuits</topic><topic>Microstructure</topic><topic>Minimal surfaces</topic><topic>Oxygen plasma</topic><topic>Plasma etching</topic><topic>Protective coatings</topic><topic>Semiconductor production equipment</topic><topic>Silicon</topic><topic>Substrates</topic><topic>Temperature</topic><topic>Yttrium</topic><topic>Yttrium-aluminum garnet</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Park, Eui Keun</creatorcontrib><creatorcontrib>Jang, Hwan-Yoon</creatorcontrib><creatorcontrib>Jeon, Seo-Yeon</creatorcontrib><creatorcontrib>Raju, Kati</creatorcontrib><creatorcontrib>Lee, Hyun-Kwuon</creatorcontrib><collection>PubMed</collection><collection>CrossRef</collection><collection>Engineered Materials Abstracts</collection><collection>Technology Research Database</collection><collection>ProQuest SciTech Collection</collection><collection>ProQuest Technology Collection</collection><collection>Materials Science & Engineering Collection</collection><collection>ProQuest Central (Alumni Edition)</collection><collection>ProQuest Central UK/Ireland</collection><collection>ProQuest Central Essentials</collection><collection>ProQuest Central</collection><collection>Technology Collection</collection><collection>ProQuest One Community College</collection><collection>ProQuest Materials Science Collection</collection><collection>ProQuest Central Korea</collection><collection>SciTech Premium Collection</collection><collection>Materials Research Database</collection><collection>Materials Science Database</collection><collection>Materials Science Collection</collection><collection>Publicly Available Content Database</collection><collection>ProQuest One Academic Eastern Edition (DO NOT USE)</collection><collection>ProQuest One Academic</collection><collection>ProQuest One Academic UKI Edition</collection><collection>ProQuest Central China</collection><collection>MEDLINE - Academic</collection><collection>PubMed Central (Full Participant titles)</collection><jtitle>Materials</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Park, Eui Keun</au><au>Jang, Hwan-Yoon</au><au>Jeon, Seo-Yeon</au><au>Raju, Kati</au><au>Lee, Hyun-Kwuon</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Fabrication, Microstructure and Plasma Resistance Behavior of Y-Al-Si-O (YAS) Glass-Ceramics Coated on Alumina Ceramics</atitle><jtitle>Materials</jtitle><addtitle>Materials (Basel)</addtitle><date>2024-09-18</date><risdate>2024</risdate><volume>17</volume><issue>18</issue><spage>4585</spage><pages>4585-</pages><issn>1996-1944</issn><eissn>1996-1944</eissn><abstract>This study investigates the fabrication, microstructural characteristics and plasma resistance of Y-Al-Si-O (YAS) glass-ceramics coated on alumina ceramics. YAS frits were initially prepared using a melt-quenching method, then homogenously milled and coated onto alumina ceramics. The melt-coating process was conducted at 1650 °C for 1 h. The composition and microstructure of the glass frits and coatings were thoroughly characterized using X-ray diffraction, scanning electron microscopy, and energy-dispersive X-ray spectroscopy. These analyses revealed a dense microstructure with a polycrystalline structure predominantly composed of Y
Al
O
(YAG) phase and a minor phase of Y
Si
O
. The YAS coatings on alumina revealed a dense layer with strong adhesion to the substrate. Subsequently, the coatings underwent C
F
/Ar/O
plasma treatment for 1 h. Plasma exposure tests demonstrated that the YAS-coated alumina exhibited significantly better etching resistance compared to uncoated alumina, with minimal surface damage observed on the YAS coating, confirming its protective properties against plasma. The superior plasma resistance of YAS coatings is attributed to the predominance of its YAG phase. This research offers a more stable and cost-efficient solution for protecting ceramics in demanding plasma environments.</abstract><cop>Switzerland</cop><pub>MDPI AG</pub><pmid>39336326</pmid><doi>10.3390/ma17184585</doi><orcidid>https://orcid.org/0009-0001-1097-0639</orcidid><orcidid>https://orcid.org/0000-0002-0853-5574</orcidid><oa>free_for_read</oa></addata></record> |
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| ispartof | Materials, 2024-09, Vol.17 (18), p.4585 |
| issn | 1996-1944 1996-1944 |
| language | eng |
| recordid | cdi_pubmedcentral_primary_oai_pubmedcentral_nih_gov_11432973 |
| source | Elektronische Zeitschriftenbibliothek - Frei zugängliche E-Journals; PubMed Central Open Access; MDPI - Multidisciplinary Digital Publishing Institute; PubMed Central; Free Full-Text Journals in Chemistry |
| subjects | Adhesive strength Aerosols Alumina Aluminum Aluminum oxide Ceramic glazes Ceramics Corrosion resistance Glass ceramics Integrated circuit fabrication Integrated circuits Microstructure Minimal surfaces Oxygen plasma Plasma etching Protective coatings Semiconductor production equipment Silicon Substrates Temperature Yttrium Yttrium-aluminum garnet |
| title | Fabrication, Microstructure and Plasma Resistance Behavior of Y-Al-Si-O (YAS) Glass-Ceramics Coated on Alumina Ceramics |
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