Tungsten–SiO2–Based Planar Field Emission Microtriodes with Different Electrode Topologies

This study examines the electrical properties and layer quality of field emission microtriodes that have planar electrode geometry and are based on tungsten (W) and silicon dioxide (SiO2). Two types of microtriodes were analyzed: one with a multi-tip cathode fabricated using photolithography (PL) an...

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Veröffentlicht in:	Materials 2023-08, Vol.16 (17), p.5781
Hauptverfasser:	Avotina, Liga, Bikse, Liga, Dekhtyar, Yuri, Goldmane, Annija Elizabete, Kizane, Gunta, Muhin, Aleksei, Romanova, Marina, Smits, Krisjanis, Sorokins, Hermanis, Vilken, Aleksandr, Zaslavskis, Aleksandrs
Format:	Artikel
Sprache:	eng
Schlagworte:	Cathodes Electric fields Electrical properties Electrodes Electrons Emission analysis Etching Field emission Homogeneity Ion beams Microscopy Oxidation Photoelectrons Photolithography Photonics Power supply Radiation Silicon dioxide Silicon substrates Spectrum analysis Surface roughness Topology Tungsten Work functions X ray photoelectron spectroscopy
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