Insight into the electronic, elastic, structural, thermal, and optical characteristics of potassium magnesium fluoride KMgF 3 with isotropic external stress
The demand for increasingly fine detail in optical lithography for semiconductors necessitates the use of lower-wavelength lithographic light. This drives the need for lenses in optical lithography steppers made of vacuum ultraviolet-transparent (VUV-transparent) materials. In this work, the density...
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Veröffentlicht in: | Heliyon 2024-09, Vol.10 (17), p.e36159 |
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Hauptverfasser: | , , , , |
Format: | Artikel |
Sprache: | eng |
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