EXPRESS: Nondispersive Ultraviolet-Visible Gas Analyzer for Monitoring Molybdenum Chloride and Oxychloride Precursors During Vapor Deposition Processes

Non-dispersive ultraviolet-visible (UV-Vis) gas analyzer designs were evaluated for monitoring molybdenum-containing chloride and oxychloride precursor delivery during microelectronics vapor deposition processes. The performances of three analyzer designs, which differed only in the bandpass filter...

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Veröffentlicht in:	Applied spectroscopy 2024-08, p.37028241268260
Hauptverfasser:	Maslar, James E, Kalanyan, Berc
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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