Application of Molecular Vapour Deposited Al 2 O 3 for Graphene-Based Biosensor Passivation and Improvements in Graphene Device Homogeneity
Graphene-based point-of-care (PoC) and chemical sensors can be fabricated using photolithographic processes at wafer-scale. However, these approaches are known to leave polymer residues on the graphene surface, which are difficult to remove completely. In addition, graphene growth and transfer proce...
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Veröffentlicht in: | Nanomaterials (Basel, Switzerland) Switzerland), 2021-08, Vol.11 (8) |
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Hauptverfasser: | , , , , , , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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