High-energy x-ray nanotomography introducing an apodization Fresnel zone plate objective lens

In this study, high-energy x-ray nanotomography (nano-computed tomography, nano-CT) based on full-field x-ray microscopy was developed. Fine two-dimensional and three-dimensional (3D) structures with linewidths of 75 nm–100 nm were successfully resolved in the x-ray energy range of 15 keV–37.7 keV....

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Veröffentlicht in:Review of scientific instruments 2021-02, Vol.92 (2), p.023701-023701
Hauptverfasser: Takeuchi, Akihisa, Uesugi, Kentaro, Uesugi, Masayuki, Toda, Hiroyuki, Hirayama, Kyosuke, Shimizu, Kazuyuki, Matsuo, Koichi, Nakamura, Takashi
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Sprache:eng
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