High-energy x-ray nanotomography introducing an apodization Fresnel zone plate objective lens
In this study, high-energy x-ray nanotomography (nano-computed tomography, nano-CT) based on full-field x-ray microscopy was developed. Fine two-dimensional and three-dimensional (3D) structures with linewidths of 75 nm–100 nm were successfully resolved in the x-ray energy range of 15 keV–37.7 keV....
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Veröffentlicht in: | Review of scientific instruments 2021-02, Vol.92 (2), p.023701-023701 |
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Sprache: | eng |
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