Engineering inclined orientations of piezoelectric films for integrated acoustofluidics and lab-on-a-chip operated in liquid environments

Different acoustic wave modes are required for effective implementation of biosensing and liquid actuation functions in an acoustic wave-based lab-on-a-chip. For efficient sensing in liquids, shear waves (either a thickness-shear bulk wave or a shear-horizontal surface acoustic wave) can achieve a h...

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Veröffentlicht in:	Lab on a chip 2021-01, Vol.21 (2), p.254-271
Hauptverfasser:	Fu, Yong-Qing, Pang, Hua-Feng, Torun, Hamdi, Tao, Ran, McHale, Glen, Reboud, Julien, Tao, Kai, Zhou, Jian, Luo, Jingting, Gibson, Desmond, Luo, Jikui, Hu, PingAn
Format:	Artikel
Sprache:	eng
Schlagworte:	Acoustics Actuation Crystal structure Crystallinity Lab-on-a-chip Microfluidics Piezoelectric films Rayleigh waves S waves Shear Substrates Surface acoustic waves Thickness Wave power
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