Chemistry of ruthenium as an electrode for metal-insulator-metal capacitor application

Notwithstanding its excellent properties such as high work function and low resistance, Ru has not been widely applied in the preparation of electrodes for various electronic devices. This is because of the occurrence of severe morphological degradation in the actual devices employing Ru. Herein, we...

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Veröffentlicht in:	Nanotechnology 2021-01, Vol.32 (4), p.045201-045201
Hauptverfasser:	Jung, Eui Young, Bang, Jeongil, Hwang, Ji Hyeon, Han, Dong Hee, Kim, Youngjin, Kim, Haeryong, Jeon, Woojin
Format:	Artikel
Sprache:	eng
Schlagworte:	electrical property electrode metal-insulator-metal capacitor ruthenium ruthenium oxide subsurface oxygen surface morphology
Online-Zugang:	Volltext
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