Effect of Annealing Temperature on Spatial Atomic Layer Deposited Titanium Oxide and Its Application in Perovskite Solar Cells

In this study, spatial atomic layer deposition (sALD) is employed to prepare titanium dioxide (TiO2) thin films by using titanium tetraisopropoxide and water as metal and water precursors, respectively. The post-annealing temperature is varied to investigate its effect on the properties of the TiO(2...

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Veröffentlicht in:	Nanomaterials (Basel, Switzerland) Switzerland), 2020-07, Vol.10 (7), p.1322, Article 1322
Hauptverfasser:	Hsu, Chia-Hsun, Chen, Ka-Te, Huang, Pao-Hsun, Wu, Wan-Yu, Zhang, Xiao-Ying, Wang, Chen, Liang, Lu-Sheng, Gao, Peng, Qiu, Yu, Lien, Shui-Yang, Su, Zhan-Bo, Chen, Zi-Rong, Zhu, Wen-Zhang
Format:	Artikel
Sprache:	eng
Schlagworte:	annealing Chemistry Chemistry, Multidisciplinary electron transport layer Materials Science Materials Science, Multidisciplinary Nanoscience & Nanotechnology perovskite Physical Sciences Physics Physics, Applied Science & Technology Science & Technology - Other Topics spatial atomic layer deposition Technology titanium dioxide
Online-Zugang:	Volltext
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